RADIAL DISTRIBUTION OF EXCITED ATOMS IN A NEW COAXIAL LINE TYPE MICROWAVE CW DISCHARGE TUBE.

Isamu Kato; Hisazumi Tsuchida; Masaru Nagai

doi:10.1063/1.327444

RADIAL DISTRIBUTION OF EXCITED ATOMS IN A NEW COAXIAL LINE TYPE MICROWAVE CW DISCHARGE TUBE.

Isamu Kato^*, Hisazumi Tsuchida, Masaru Nagai

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

A new microwave discharge method for obtaining a plasma suitable for a gas laser medium and plasma chemical vapor deposition is investigated. When the plasma frequency is higher than that of the microwave power supplied to the plasma in the coaxial line mode, the plasma plays an important role as the inner conductor of the coaxial line. Therefore cylindrical plasma of the arbitrary size which is uniform along the circumference and in the radial direction can be produced. The radial distribution of the excited atom densitY of the plasma is measured using the side-light method. It is found that the microwave discharge has the proper distribution. The distribution is not bell-shaped, but is either trapezoidal in shape or has a central dip.

Original language	English
Pages (from-to)	5312-5315
Number of pages	4
Journal	Journal of Applied Physics
Volume	51
Issue number	10
DOIs	https://doi.org/10.1063/1.327444
Publication status	Published - 1980 Oct

ASJC Scopus subject areas

Physics and Astronomy(all)
Physics and Astronomy (miscellaneous)

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title = "RADIAL DISTRIBUTION OF EXCITED ATOMS IN A NEW COAXIAL LINE TYPE MICROWAVE CW DISCHARGE TUBE.",

abstract = "A new microwave discharge method for obtaining a plasma suitable for a gas laser medium and plasma chemical vapor deposition is investigated. When the plasma frequency is higher than that of the microwave power supplied to the plasma in the coaxial line mode, the plasma plays an important role as the inner conductor of the coaxial line. Therefore cylindrical plasma of the arbitrary size which is uniform along the circumference and in the radial direction can be produced. The radial distribution of the excited atom densitY of the plasma is measured using the side-light method. It is found that the microwave discharge has the proper distribution. The distribution is not bell-shaped, but is either trapezoidal in shape or has a central dip.",

author = "Isamu Kato and Hisazumi Tsuchida and Masaru Nagai",

year = "1980",

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AU - Tsuchida, Hisazumi

AU - Nagai, Masaru

PY - 1980/10

Y1 - 1980/10

N2 - A new microwave discharge method for obtaining a plasma suitable for a gas laser medium and plasma chemical vapor deposition is investigated. When the plasma frequency is higher than that of the microwave power supplied to the plasma in the coaxial line mode, the plasma plays an important role as the inner conductor of the coaxial line. Therefore cylindrical plasma of the arbitrary size which is uniform along the circumference and in the radial direction can be produced. The radial distribution of the excited atom densitY of the plasma is measured using the side-light method. It is found that the microwave discharge has the proper distribution. The distribution is not bell-shaped, but is either trapezoidal in shape or has a central dip.

AB - A new microwave discharge method for obtaining a plasma suitable for a gas laser medium and plasma chemical vapor deposition is investigated. When the plasma frequency is higher than that of the microwave power supplied to the plasma in the coaxial line mode, the plasma plays an important role as the inner conductor of the coaxial line. Therefore cylindrical plasma of the arbitrary size which is uniform along the circumference and in the radial direction can be produced. The radial distribution of the excited atom densitY of the plasma is measured using the side-light method. It is found that the microwave discharge has the proper distribution. The distribution is not bell-shaped, but is either trapezoidal in shape or has a central dip.

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RADIAL DISTRIBUTION OF EXCITED ATOMS IN A NEW COAXIAL LINE TYPE MICROWAVE CW DISCHARGE TUBE.

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