Reduction of contact resistivity by As redistribution during Pd 2Si formation

I. Ohdomari*, M. Hori, T. Maeda, A. Ogura, H. Kawarada, T. Hamamoto, K. Sano, K. N. Tu, M. Wittmer, I. Kimura, K. Yoneda

*Corresponding author for this work

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Physics & Astronomy