Report of VAMAS-SCA-WG in Japan

Takuichi Ohmura, Akira Kurokawa, Ryuichi Shimizu, Teiichi Homma, Daisuke Fujita, Keisuke Goto, Masao Uemura, Heizo Tokutaka, Kazuhiro Yoshihara, Masayasu Kurahashi, Shingo Ichimura, Chuhei Oshima, Fusami Soeda, Yasuo Fukuda, Yoshihiro Hashiguchi, Kozo Tanaka, Masahiro Kudo, Takayoshi Hayashi, Akihiro Tanaka, Yoshiro ShiokawaTetsu Sekine

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


Under the auspices of the 141 comittee (Microbeam Analysis) of Japan Society for Promotion of Science, the AES working group has commenced its work on 1) the establishment of the measurement conditions and 2) the comparison of standard spectra obtained by various spectrometers. Attention was particularly paid to taking the Auger signals at an optimum position of the specimen with respect to the energy analyzer. Systematic investigations on the procedures for energy analyzers, cylindrical mirror analyzers (CMA), are reported in the first section of the present paper. Three kinds of calibration procedures were proposed for attaining the optimum positioning of the specimen with respect to the CMA. Elastic peak varied sensitively in intensity and peak shape, around the optimum position of the specimen. The comparison of AES instruments installed at several institutes was carried out by measurement of the derivative Auger peak intensity ratio for pure gold and copper under a specific measurement condition, proposed in the first section. The results are shown by the Youden plot following the laborious work performed by the ASTM comittee E-42.

Original languageEnglish
Pages (from-to)744-754
Number of pages11
JournalShinku/Journal of the Vacuum Society of Japan
Issue number8
Publication statusPublished - 1988
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering


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