TY - JOUR
T1 - Report of VAMAS-SCA-WG in Japan
AU - Ohmura, Takuichi
AU - Kurokawa, Akira
AU - Shimizu, Ryuichi
AU - Homma, Teiichi
AU - Fujita, Daisuke
AU - Goto, Keisuke
AU - Uemura, Masao
AU - Tokutaka, Heizo
AU - Yoshihara, Kazuhiro
AU - Kurahashi, Masayasu
AU - Ichimura, Shingo
AU - Oshima, Chuhei
AU - Soeda, Fusami
AU - Fukuda, Yasuo
AU - Hashiguchi, Yoshihiro
AU - Tanaka, Kozo
AU - Kudo, Masahiro
AU - Hayashi, Takayoshi
AU - Tanaka, Akihiro
AU - Shiokawa, Yoshiro
AU - Sekine, Tetsu
PY - 1988
Y1 - 1988
N2 - Under the auspices of the 141 comittee (Microbeam Analysis) of Japan Society for Promotion of Science, the AES working group has commenced its work on 1) the establishment of the measurement conditions and 2) the comparison of standard spectra obtained by various spectrometers. Attention was particularly paid to taking the Auger signals at an optimum position of the specimen with respect to the energy analyzer. Systematic investigations on the procedures for energy analyzers, cylindrical mirror analyzers (CMA), are reported in the first section of the present paper. Three kinds of calibration procedures were proposed for attaining the optimum positioning of the specimen with respect to the CMA. Elastic peak varied sensitively in intensity and peak shape, around the optimum position of the specimen. The comparison of AES instruments installed at several institutes was carried out by measurement of the derivative Auger peak intensity ratio for pure gold and copper under a specific measurement condition, proposed in the first section. The results are shown by the Youden plot following the laborious work performed by the ASTM comittee E-42.
AB - Under the auspices of the 141 comittee (Microbeam Analysis) of Japan Society for Promotion of Science, the AES working group has commenced its work on 1) the establishment of the measurement conditions and 2) the comparison of standard spectra obtained by various spectrometers. Attention was particularly paid to taking the Auger signals at an optimum position of the specimen with respect to the energy analyzer. Systematic investigations on the procedures for energy analyzers, cylindrical mirror analyzers (CMA), are reported in the first section of the present paper. Three kinds of calibration procedures were proposed for attaining the optimum positioning of the specimen with respect to the CMA. Elastic peak varied sensitively in intensity and peak shape, around the optimum position of the specimen. The comparison of AES instruments installed at several institutes was carried out by measurement of the derivative Auger peak intensity ratio for pure gold and copper under a specific measurement condition, proposed in the first section. The results are shown by the Youden plot following the laborious work performed by the ASTM comittee E-42.
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U2 - 10.3131/jvsj.31.744
DO - 10.3131/jvsj.31.744
M3 - Article
AN - SCOPUS:85004332516
SN - 0559-8516
VL - 31
SP - 744
EP - 754
JO - Shinku/Journal of the Vacuum Society of Japan
JF - Shinku/Journal of the Vacuum Society of Japan
IS - 8
ER -