RF-MEMS from DC to millimeter-wave

Tamotsu Nishino*, Moriyasu Miyazaki, Yukihisa Yoshida, Motohisa Taguchi

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution


We have developed a hollow cavity structure and two types of RF-MEMS switches. The one has less parasitic capacitance to be used in high frequency band with the hollow structure. The other has compact structure with a common bias electrode to a signal line. This type suits for the cellular phone frequencies. In this paper, we introduce both of the switches, and discuss on the future applications of the RF-MEMS.

Original languageEnglish
Title of host publication2006 IEEE Mediterranean Electrotechnical Conference, MELECON 2006 - Circuits and Systems for Signal Processing, lnformation and Communication Technologies, and Power Sources and Systems
Number of pages4
Publication statusPublished - 2006
Externally publishedYes
Event2006 IEEE Mediterranean Electrotechnical Conference, MELECON 2006 - Benalmadena, Malaga, Spain
Duration: 2006 May 162006 May 19

Publication series

NameProceedings of the Mediterranean Electrotechnical Conference - MELECON


Conference2006 IEEE Mediterranean Electrotechnical Conference, MELECON 2006
CityBenalmadena, Malaga

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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