Scanning micromirror using deformation of a parylene-encapsulated liquid structure

Yuta Yoshihata; Nguyen Binh-Khiem; Atsushi Takei; Eiji Iwase; Kiyoshi Matsumoto; Isao Shimoyama

doi:10.1109/MEMSYS.2008.4443770

Scanning micromirror using deformation of a parylene-encapsulated liquid structure

Yuta Yoshihata^*, Nguyen Binh-Khiem, Atsushi Takei, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

7 Citations (Scopus)

Abstract

This paper presents a scanning micromirror using deformation of a Parylene-Encapsulated Liquid Structure (PELS). Silicone fluid is put between a silicon plate and an electrode-patterned plate. Both of the plates and liquid are encapsulated by a Parylene membrane. Gold is deposited on the surface of the Parylene membrane to fabricate an upper electrode. By applying voltage between the upper and lower electrodes, the encapsulated liquid is deformed and the silicon plate is tilted. The silicon plate is supported by the PELS, instead of usual torsion beams. When a set of four appropriately synchronized voltages is applied between the four lower electrodes and the upper electrode, two dimensional scanning motion is achieved.

Original language	English
Title of host publication	MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
Pages	770-773
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2008.4443770
Publication status	Published - 2008 Aug 29
Externally published	Yes
Event	21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States Duration: 2008 Jan 13 → 2008 Jan 17

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
Country/Territory	United States
City	Tucson, AZ
Period	08/1/13 → 08/1/17

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2008.4443770

Cite this

Yoshihata, Y., Binh-Khiem, N., Takei, A., Iwase, E., Matsumoto, K., & Shimoyama, I. (2008). Scanning micromirror using deformation of a parylene-encapsulated liquid structure. In MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems (pp. 770-773). Article 4443770 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2008.4443770

Scanning micromirror using deformation of a parylene-encapsulated liquid structure. / Yoshihata, Yuta; Binh-Khiem, Nguyen; Takei, Atsushi et al.
MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems. 2008. p. 770-773 4443770 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Yoshihata, Y, Binh-Khiem, N, Takei, A, Iwase, E, Matsumoto, K & Shimoyama, I 2008, Scanning micromirror using deformation of a parylene-encapsulated liquid structure. in MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems., 4443770, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 770-773, 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson, Tucson, AZ, United States, 08/1/13. https://doi.org/10.1109/MEMSYS.2008.4443770

Yoshihata Y, Binh-Khiem N, Takei A, Iwase E, Matsumoto K, Shimoyama I. Scanning micromirror using deformation of a parylene-encapsulated liquid structure. In MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems. 2008. p. 770-773. 4443770. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2008.4443770

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abstract = "This paper presents a scanning micromirror using deformation of a Parylene-Encapsulated Liquid Structure (PELS). Silicone fluid is put between a silicon plate and an electrode-patterned plate. Both of the plates and liquid are encapsulated by a Parylene membrane. Gold is deposited on the surface of the Parylene membrane to fabricate an upper electrode. By applying voltage between the upper and lower electrodes, the encapsulated liquid is deformed and the silicon plate is tilted. The silicon plate is supported by the PELS, instead of usual torsion beams. When a set of four appropriately synchronized voltages is applied between the four lower electrodes and the upper electrode, two dimensional scanning motion is achieved.",

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AB - This paper presents a scanning micromirror using deformation of a Parylene-Encapsulated Liquid Structure (PELS). Silicone fluid is put between a silicon plate and an electrode-patterned plate. Both of the plates and liquid are encapsulated by a Parylene membrane. Gold is deposited on the surface of the Parylene membrane to fabricate an upper electrode. By applying voltage between the upper and lower electrodes, the encapsulated liquid is deformed and the silicon plate is tilted. The silicon plate is supported by the PELS, instead of usual torsion beams. When a set of four appropriately synchronized voltages is applied between the four lower electrodes and the upper electrode, two dimensional scanning motion is achieved.

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Scanning micromirror using deformation of a parylene-encapsulated liquid structure

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