Abstract
We report the successful self-excited operation of the monolithic optical chopper made of quartz. The chopper is oscillated through piezoelectric strain induced by electric field between meandering electrodes on the flexible suspensions. The piezoelectric signal from the deformed suspension is detected to control the amplitude of oscillation at constant magnitude. We also employed this chopper in an optical sensor as a mechanical component to regulate the incident laser-beam, and demonstrated chopper-amplification and demodulation.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the IEEE Micro Electro Mechanical Systems |
| Place of Publication | Piscataway, NJ, United States |
| Publisher | Publ by IEEE |
| Pages | 325-330 |
| Number of pages | 6 |
| ISBN (Print) | 078031834X |
| Publication status | Published - 1994 |
| Externally published | Yes |
| Event | Proceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn Duration: 1994 Jan 25 → 1994 Jan 28 |
Other
| Other | Proceedings of the IEEE Micro Electro Mechanical Systems |
|---|---|
| City | Oiso, Jpn |
| Period | 94/1/25 → 94/1/28 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Electrical and Electronic Engineering
- Mechanical Engineering
- Engineering(all)