Self-organized metallic nanoparticle and nanowire arrays from ion-sputtered silicon templates

T. W.H. Oates, A. Keller, S. Noda, S. Facsko

Research output: Contribution to journalArticlepeer-review

69 Citations (Scopus)


We demonstrate a production method for self-organized arrays of metal nanoparticles and aligned nanowires. Ion beam-sputtered Si/SiO2 substrates are used as templates for metallic vapor deposition, forming aligned arrays of 5-20 nm silver and cobalt nanoparticles with a period of 35 nm. The 20 nm diameter cobalt nanowires with lengths in excess of a micrometer are produced under appropriate conditions. All processing steps can be integrated into a single vacuum chamber and performed in a matter of minutes at mild temperatures. This inherently scalable technique can be extended to a range of substrate materials, array patterns, and nanoparticle materials.

Original languageEnglish
Article number063106
JournalApplied Physics Letters
Issue number6
Publication statusPublished - 2008
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


Dive into the research topics of 'Self-organized metallic nanoparticle and nanowire arrays from ion-sputtered silicon templates'. Together they form a unique fingerprint.

Cite this