Sensitivity enhancement by micro helmholtz resonator for ultrasonic distance sensor

A. Suzuki; H. Takahashi; E. Iwase; K. Matsumoto; I. Shimoyama

doi:10.1109/SENSOR.2009.5285784

Sensitivity enhancement by micro helmholtz resonator for ultrasonic distance sensor

A. Suzuki^*, H. Takahashi, E. Iwase, K. Matsumoto, I. Shimoyama

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

This paper reports on a micro Helmholtz resonator (HR) enhancing the sensitivity of an ultrasonic distance sensor. Attaching an HR to the sensor that consists of a piezoresistive cantilever microphone makes its sensitivity against ultrasonic wave higher. A HR of 600 μm height demonstrated a 17.5 times larger maximum amplitude of the cantilever vibration against single frequency wave. We also evaluated the dependence of the sensitivity on frequency and acoustic pressure. Our sensor was able to detect the distance of 0.5-6.0 m with the maximum error of 2.0%.

Original language	English
Title of host publication	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	1557-1560
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2009.5285784
Publication status	Published - 2009 Dec 11
Externally published	Yes
Event	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States Duration: 2009 Jun 21 → 2009 Jun 25

Publication series

Name	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

Conference	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Country/Territory	United States
City	Denver, CO
Period	09/6/21 → 09/6/25

Keywords

Distance sensor
Helmholtz resonator
Piezoresistive cantilever

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/SENSOR.2009.5285784

Cite this

Suzuki, A., Takahashi, H., Iwase, E., Matsumoto, K., & Shimoyama, I. (2009). Sensitivity enhancement by micro helmholtz resonator for ultrasonic distance sensor. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1557-1560). Article 5285784 (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2009.5285784

Sensitivity enhancement by micro helmholtz resonator for ultrasonic distance sensor. / Suzuki, A.; Takahashi, H.; Iwase, E. et al.
TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 1557-1560 5285784 (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Suzuki, A, Takahashi, H, Iwase, E, Matsumoto, K & Shimoyama, I 2009, Sensitivity enhancement by micro helmholtz resonator for ultrasonic distance sensor. in TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems., 5285784, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, pp. 1557-1560, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, CO, United States, 09/6/21. https://doi.org/10.1109/SENSOR.2009.5285784

Suzuki A, Takahashi H, Iwase E, Matsumoto K, Shimoyama I. Sensitivity enhancement by micro helmholtz resonator for ultrasonic distance sensor. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 1557-1560. 5285784. (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). doi: 10.1109/SENSOR.2009.5285784

@inproceedings{925466c6c3514cb28c4c9cc5ee16db2f,

title = "Sensitivity enhancement by micro helmholtz resonator for ultrasonic distance sensor",

abstract = "This paper reports on a micro Helmholtz resonator (HR) enhancing the sensitivity of an ultrasonic distance sensor. Attaching an HR to the sensor that consists of a piezoresistive cantilever microphone makes its sensitivity against ultrasonic wave higher. A HR of 600 μm height demonstrated a 17.5 times larger maximum amplitude of the cantilever vibration against single frequency wave. We also evaluated the dependence of the sensitivity on frequency and acoustic pressure. Our sensor was able to detect the distance of 0.5-6.0 m with the maximum error of 2.0%.",

keywords = "Distance sensor, Helmholtz resonator, Piezoresistive cantilever",

author = "A. Suzuki and H. Takahashi and E. Iwase and K. Matsumoto and I. Shimoyama",

year = "2009",

month = dec,

day = "11",

doi = "10.1109/SENSOR.2009.5285784",

language = "English",

isbn = "9781424441938",

series = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems",

pages = "1557--1560",

booktitle = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems",

note = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems ; Conference date: 21-06-2009 Through 25-06-2009",

}

TY - GEN

T1 - Sensitivity enhancement by micro helmholtz resonator for ultrasonic distance sensor

AU - Suzuki, A.

AU - Takahashi, H.

AU - Iwase, E.

AU - Matsumoto, K.

AU - Shimoyama, I.

PY - 2009/12/11

Y1 - 2009/12/11

N2 - This paper reports on a micro Helmholtz resonator (HR) enhancing the sensitivity of an ultrasonic distance sensor. Attaching an HR to the sensor that consists of a piezoresistive cantilever microphone makes its sensitivity against ultrasonic wave higher. A HR of 600 μm height demonstrated a 17.5 times larger maximum amplitude of the cantilever vibration against single frequency wave. We also evaluated the dependence of the sensitivity on frequency and acoustic pressure. Our sensor was able to detect the distance of 0.5-6.0 m with the maximum error of 2.0%.

AB - This paper reports on a micro Helmholtz resonator (HR) enhancing the sensitivity of an ultrasonic distance sensor. Attaching an HR to the sensor that consists of a piezoresistive cantilever microphone makes its sensitivity against ultrasonic wave higher. A HR of 600 μm height demonstrated a 17.5 times larger maximum amplitude of the cantilever vibration against single frequency wave. We also evaluated the dependence of the sensitivity on frequency and acoustic pressure. Our sensor was able to detect the distance of 0.5-6.0 m with the maximum error of 2.0%.

KW - Distance sensor

KW - Helmholtz resonator

KW - Piezoresistive cantilever

UR - http://www.scopus.com/inward/record.url?scp=71449083571&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=71449083571&partnerID=8YFLogxK

U2 - 10.1109/SENSOR.2009.5285784

DO - 10.1109/SENSOR.2009.5285784

M3 - Conference contribution

AN - SCOPUS:71449083571

SN - 9781424441938

T3 - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

SP - 1557

EP - 1560

BT - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

T2 - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Y2 - 21 June 2009 through 25 June 2009

ER -

Sensitivity enhancement by micro helmholtz resonator for ultrasonic distance sensor

Abstract

Publication series

Conference

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this