Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification

Siim Heinsalu; Anna Kawano; Yuji Isogai; Yuichi Matsushima; Hiroshi Ishikawa; Katsuyuki Utaka

Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification

Siim Heinsalu, Anna Kawano, Yuji Isogai, Yuichi Matsushima, Hiroshi Ishikawa, Katsuyuki Utaka

School of Fundamental Science and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

Two methods for refractive index sensitivity improvement of silicon SW-MS BG refractive index sensors were considered. Height parameter was optimized and suspended waveguides were introduced. Experimentally obtained values were 850 nm/RIU and 1100 nm/RIU, respectively.

Original language	English
Title of host publication	2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781943580866
Publication status	Published - 2021 Jun
Event	2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - San Francisco, United States Duration: 2021 Jun 6 → 2021 Jun 11

Publication series

Name	2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings

Conference

Conference	2021 Optical Fiber Communications Conference and Exhibition, OFC 2021
Country/Territory	United States
City	San Francisco
Period	21/6/6 → 21/6/11

ASJC Scopus subject areas

Artificial Intelligence
Computer Networks and Communications
Hardware and Architecture
Signal Processing
Electronic, Optical and Magnetic Materials
Instrumentation
Atomic and Molecular Physics, and Optics

Cite this

Heinsalu, S., Kawano, A., Isogai, Y., Matsushima, Y., Ishikawa, H., & Utaka, K. (2021). Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification. In 2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings [9489640] (2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings). Institute of Electrical and Electronics Engineers Inc..

Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification. / Heinsalu, Siim; Kawano, Anna; Isogai, Yuji et al.
2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2021. 9489640 (2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Heinsalu, S, Kawano, A, Isogai, Y, Matsushima, Y, Ishikawa, H & Utaka, K 2021, Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification. in 2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings., 9489640, 2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings, Institute of Electrical and Electronics Engineers Inc., 2021 Optical Fiber Communications Conference and Exhibition, OFC 2021, San Francisco, United States, 21/6/6.

Heinsalu S, Kawano A, Isogai Y, Matsushima Y, Ishikawa H , Utaka K. Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification. In 2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2021. 9489640. (2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings).

Heinsalu, Siim ; Kawano, Anna ; Isogai, Yuji et al. / Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification. 2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2021. (2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings).

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title = "Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification",

abstract = "Two methods for refractive index sensitivity improvement of silicon SW-MS BG refractive index sensors were considered. Height parameter was optimized and suspended waveguides were introduced. Experimentally obtained values were 850 nm/RIU and 1100 nm/RIU, respectively.",

author = "Siim Heinsalu and Anna Kawano and Yuji Isogai and Yuichi Matsushima and Hiroshi Ishikawa and Katsuyuki Utaka",

note = "Publisher Copyright: {\textcopyright} 2021 OSA.; 2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 ; Conference date: 06-06-2021 Through 11-06-2021",

year = "2021",

month = jun,

language = "English",

series = "2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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TY - GEN

T1 - Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification

AU - Heinsalu, Siim

AU - Kawano, Anna

AU - Isogai, Yuji

AU - Matsushima, Yuichi

AU - Ishikawa, Hiroshi

AU - Utaka, Katsuyuki

PY - 2021/6

Y1 - 2021/6

N2 - Two methods for refractive index sensitivity improvement of silicon SW-MS BG refractive index sensors were considered. Height parameter was optimized and suspended waveguides were introduced. Experimentally obtained values were 850 nm/RIU and 1100 nm/RIU, respectively.

AB - Two methods for refractive index sensitivity improvement of silicon SW-MS BG refractive index sensors were considered. Height parameter was optimized and suspended waveguides were introduced. Experimentally obtained values were 850 nm/RIU and 1100 nm/RIU, respectively.

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M3 - Conference contribution

AN - SCOPUS:85112103910

T3 - 2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings

BT - 2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2021 Optical Fiber Communications Conference and Exhibition, OFC 2021

Y2 - 6 June 2021 through 11 June 2021

ER -

Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification

Abstract

Publication series

Conference

ASJC Scopus subject areas

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