Sheet resistance underneath the Au ohmic-electrode on hydrogen-terminated surface-conductive diamond (001)

S. Kono; T. Sasaki; M. Inaba; A. Hiraiwa; H. Kawarada

doi:10.1016/j.diamond.2017.09.020

Sheet resistance underneath the Au ohmic-electrode on hydrogen-terminated surface-conductive diamond (001)

S. Kono^*, T. Sasaki, M. Inaba, A. Hiraiwa, H. Kawarada

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

The sheet resistance (R_sk) underneath ohmic Au-electrodes on hydrogen-terminated surface-conductive diamond (001) surfaces was examined by a special current-voltage measurement. It has been found that R_sk is about ~ 200 times larger than the sheet resistance, R_sh, in the open areas without Au-electrodes. The specific contact resistance, R_C, of ohmic Au-electrodes on H-terminated surface-conductive diamonds as determined by linear transmission line models must be corrected accordingly. As the results of this, R_C is suggested to be of the order of 1 × 10^{− 3} – 1 × 10^{− 4} Ωcm².

Original language	English
Pages (from-to)	93-98
Number of pages	6
Journal	Diamond and Related Materials
Volume	80
DOIs	https://doi.org/10.1016/j.diamond.2017.09.020
Publication status	Published - 2017 Nov

Keywords

Chemical vaper deposition
Current-voltage measurement
Gold ohmic contact
Hydrogen-terminated diamond
Sheet resistance
Surface conductive layer

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Chemistry(all)
Mechanical Engineering
Materials Chemistry
Electrical and Electronic Engineering

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10.1016/j.diamond.2017.09.020

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@article{321a36b9ad7143149a2da018777de90d,

title = "Sheet resistance underneath the Au ohmic-electrode on hydrogen-terminated surface-conductive diamond (001)",

abstract = "The sheet resistance (Rsk) underneath ohmic Au-electrodes on hydrogen-terminated surface-conductive diamond (001) surfaces was examined by a special current-voltage measurement. It has been found that Rsk is about ~ 200 times larger than the sheet resistance, Rsh, in the open areas without Au-electrodes. The specific contact resistance, RC, of ohmic Au-electrodes on H-terminated surface-conductive diamonds as determined by linear transmission line models must be corrected accordingly. As the results of this, RC is suggested to be of the order of 1 × 10− 3 – 1 × 10− 4 Ωcm2.",

keywords = "Chemical vaper deposition, Current-voltage measurement, Gold ohmic contact, Hydrogen-terminated diamond, Sheet resistance, Surface conductive layer",

author = "S. Kono and T. Sasaki and M. Inaba and A. Hiraiwa and H. Kawarada",

note = "Funding Information: The present work is partly supported by a Grant-in-Aid for Scientific Research (S) (Grant Number 26220903), Grant-in-Aid for Scientific Research (A) (Grant Number 26246001), and Grant-in-Aid for Scientific Research (B) (Grant Number 15H03980) from the Japan Society for the Promotion of Science (JSPS). Publisher Copyright: {\textcopyright} 2017 Elsevier B.V.",

year = "2017",

month = nov,

doi = "10.1016/j.diamond.2017.09.020",

language = "English",

volume = "80",

pages = "93--98",

journal = "Diamond and Related Materials",

issn = "0925-9635",

publisher = "Elsevier BV",

}

TY - JOUR

T1 - Sheet resistance underneath the Au ohmic-electrode on hydrogen-terminated surface-conductive diamond (001)

AU - Kono, S.

AU - Sasaki, T.

AU - Inaba, M.

AU - Hiraiwa, A.

AU - Kawarada, H.

N1 - Funding Information: The present work is partly supported by a Grant-in-Aid for Scientific Research (S) (Grant Number 26220903), Grant-in-Aid for Scientific Research (A) (Grant Number 26246001), and Grant-in-Aid for Scientific Research (B) (Grant Number 15H03980) from the Japan Society for the Promotion of Science (JSPS). Publisher Copyright: © 2017 Elsevier B.V.

PY - 2017/11

Y1 - 2017/11

N2 - The sheet resistance (Rsk) underneath ohmic Au-electrodes on hydrogen-terminated surface-conductive diamond (001) surfaces was examined by a special current-voltage measurement. It has been found that Rsk is about ~ 200 times larger than the sheet resistance, Rsh, in the open areas without Au-electrodes. The specific contact resistance, RC, of ohmic Au-electrodes on H-terminated surface-conductive diamonds as determined by linear transmission line models must be corrected accordingly. As the results of this, RC is suggested to be of the order of 1 × 10− 3 – 1 × 10− 4 Ωcm2.

AB - The sheet resistance (Rsk) underneath ohmic Au-electrodes on hydrogen-terminated surface-conductive diamond (001) surfaces was examined by a special current-voltage measurement. It has been found that Rsk is about ~ 200 times larger than the sheet resistance, Rsh, in the open areas without Au-electrodes. The specific contact resistance, RC, of ohmic Au-electrodes on H-terminated surface-conductive diamonds as determined by linear transmission line models must be corrected accordingly. As the results of this, RC is suggested to be of the order of 1 × 10− 3 – 1 × 10− 4 Ωcm2.

KW - Chemical vaper deposition

KW - Current-voltage measurement

KW - Gold ohmic contact

KW - Hydrogen-terminated diamond

KW - Sheet resistance

KW - Surface conductive layer

UR - http://www.scopus.com/inward/record.url?scp=85032036782&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85032036782&partnerID=8YFLogxK

U2 - 10.1016/j.diamond.2017.09.020

DO - 10.1016/j.diamond.2017.09.020

M3 - Article

AN - SCOPUS:85032036782

SN - 0925-9635

VL - 80

SP - 93

EP - 98

JO - Diamond and Related Materials

JF - Diamond and Related Materials

ER -

Sheet resistance underneath the Au ohmic-electrode on hydrogen-terminated surface-conductive diamond (001)

Abstract

Keywords

ASJC Scopus subject areas

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