Similarities in the electrical conduction processes in hydrogenated amorphous silicon oxynitride and silicon nitride

Hiromitsu Kato*, Hidefumi Sato, Yoshimichi Ohki, Kwang Soo Seol, Takashi Noma

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

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Chemical Compounds

Physics & Astronomy

Engineering & Materials Science