TY - JOUR
T1 - Single-crystal diamond microelectromechanical resonator integrating with magneto-strictive galfenol film for magnetic sensor
AU - Zhang, Zilong
AU - Wu, Haihua
AU - Sang, Liwen
AU - Huang, Jian
AU - Takahashi, Yukiko
AU - Wang, Linjun
AU - Imura, Masataka
AU - Koizumi, Satoshi
AU - Koide, Yasuo
AU - Liao, Meiyong
N1 - Funding Information:
This work was partially supported by JSPS KAKENHI (Grant Number 15H03999 , 15H03980 ), Tsukuba Global Innovation Promotion Agency, Science and Technology Commission of Shanghai (Grant Number 16010500500 ) and Nanotechnology Platform projects sponsored by the Ministry of Education, Culture, Sports, and Technology (MEXT) of Japan . The authors also gratefully thanked financial support from China Scholarship Council.
Publisher Copyright:
© 2019 Elsevier Ltd
PY - 2019/11
Y1 - 2019/11
N2 - Single-crystal diamond (SCD) is a promising material for micro-electromechanical system (MEMS) devices to achieve high performance and reliability due to its prominent mechanical and physical properties. However, the application of SCD MEMS has not been practically achieved due to the lack of device concept for SCD MEMS. Here, the SCD MEMS resonator based magnetic sensor is successfully realized with integrating of a large magneto-strictive galfenol film on SCD mechanical resonator with high performance. It is concluded that SCD provides a suitable substrate for galfenol film with excellent magnetic properties. Along with the high-quality factor of the SCD MEMS resonator, a high magnetic field sensitivity of 4.83 Hz/mT and an extremely low detectable force of 2.14 × 10−12 N are achieved. Based on the experimental results, the estimated minimum detectable force, magnetic field and energy reach 1.76 × 10−14 N, 1.42 × 10−10 T and 8.4 × 10−29 J. The successful fabrication of SCD MEMS magnetic sensor provides a promising strategy for broadening the application of SCD MEMS with merits super to other ones, such as nanoscale to microscale spatial resolution, wide-range magnetic field sensing, high sensitivity, high temperature operation, and facile integration with CMOS.
AB - Single-crystal diamond (SCD) is a promising material for micro-electromechanical system (MEMS) devices to achieve high performance and reliability due to its prominent mechanical and physical properties. However, the application of SCD MEMS has not been practically achieved due to the lack of device concept for SCD MEMS. Here, the SCD MEMS resonator based magnetic sensor is successfully realized with integrating of a large magneto-strictive galfenol film on SCD mechanical resonator with high performance. It is concluded that SCD provides a suitable substrate for galfenol film with excellent magnetic properties. Along with the high-quality factor of the SCD MEMS resonator, a high magnetic field sensitivity of 4.83 Hz/mT and an extremely low detectable force of 2.14 × 10−12 N are achieved. Based on the experimental results, the estimated minimum detectable force, magnetic field and energy reach 1.76 × 10−14 N, 1.42 × 10−10 T and 8.4 × 10−29 J. The successful fabrication of SCD MEMS magnetic sensor provides a promising strategy for broadening the application of SCD MEMS with merits super to other ones, such as nanoscale to microscale spatial resolution, wide-range magnetic field sensing, high sensitivity, high temperature operation, and facile integration with CMOS.
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U2 - 10.1016/j.carbon.2019.06.072
DO - 10.1016/j.carbon.2019.06.072
M3 - Article
AN - SCOPUS:85067895647
SN - 0008-6223
VL - 152
SP - 788
EP - 795
JO - Carbon
JF - Carbon
ER -