Solution-based fabrication of high-κ dielectric nanofilms using titania nanosheets as a building block

Minoru Osada; Kosho Akatsuka; Yasuo Ebina; Hiroshi Funakubo; Takanori Kiguchi; Kazunori Takada; Takayoshi Sasaki

doi:10.1143/JJAP.46.6979

Solution-based fabrication of high-κ dielectric nanofilms using titania nanosheets as a building block

Minoru Osada^*, Kosho Akatsuka, Yasuo Ebina, Hiroshi Funakubo, Takanori Kiguchi, Kazunori Takada, Takayoshi Sasaki

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Abstract

We have demonstrated a novel procedure for fabricating high-κ dielectric nanofilms by using a titania nanosheet as a building block. The layer-by-layer assembly of titania nanosheets using an atomically flat SrRuO₃ substrate is advantageous as a means of fabricating atomically uniform multilayer high-κ nanofilms. High-resolution transmission electron microscopy revealed that these multilayer nanofilms are composed of a well-ordered lamellar structure without an interfacial dead layer. These nanofilms exhibited both high dielectric constant (ε_r ∼ 125) and low leakage current density (J < 10^-7A/cm²) even for thicknesses as low as 10nm. These results indicate that the titania nanosheet is a very promising candidate as a high-κ nanoblock, and its bottom-up fabrication provides new opportunities for the development of high-κ devices.

Original language	English
Pages (from-to)	6979-6983
Number of pages	5
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	46
Issue number	10 B
DOIs	https://doi.org/10.1143/JJAP.46.6979
Publication status	Published - 2007 Oct 22
Externally published	Yes

Keywords

High-κ dielectrics
Layer-by-layer assembly
Titania nanosheet

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

Access to Document

10.1143/JJAP.46.6979

Cite this

Solution-based fabrication of high-κ dielectric nanofilms using titania nanosheets as a building block. / Osada, Minoru; Akatsuka, Kosho; Ebina, Yasuo et al.
In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 46, No. 10 B, 22.10.2007, p. 6979-6983.

Research output: Contribution to journal › Article › peer-review

@article{f385ebda032d486f93fedb21cf558c9a,

title = "Solution-based fabrication of high-κ dielectric nanofilms using titania nanosheets as a building block",

abstract = "We have demonstrated a novel procedure for fabricating high-κ dielectric nanofilms by using a titania nanosheet as a building block. The layer-by-layer assembly of titania nanosheets using an atomically flat SrRuO3 substrate is advantageous as a means of fabricating atomically uniform multilayer high-κ nanofilms. High-resolution transmission electron microscopy revealed that these multilayer nanofilms are composed of a well-ordered lamellar structure without an interfacial dead layer. These nanofilms exhibited both high dielectric constant (εr ∼ 125) and low leakage current density (J < 10-7A/cm2) even for thicknesses as low as 10nm. These results indicate that the titania nanosheet is a very promising candidate as a high-κ nanoblock, and its bottom-up fabrication provides new opportunities for the development of high-κ devices.",

keywords = "High-κ dielectrics, Layer-by-layer assembly, Titania nanosheet",

author = "Minoru Osada and Kosho Akatsuka and Yasuo Ebina and Hiroshi Funakubo and Takanori Kiguchi and Kazunori Takada and Takayoshi Sasaki",

year = "2007",

month = oct,

day = "22",

doi = "10.1143/JJAP.46.6979",

language = "English",

volume = "46",

pages = "6979--6983",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

number = "10 B",

}

TY - JOUR

T1 - Solution-based fabrication of high-κ dielectric nanofilms using titania nanosheets as a building block

AU - Osada, Minoru

AU - Akatsuka, Kosho

AU - Ebina, Yasuo

AU - Funakubo, Hiroshi

AU - Kiguchi, Takanori

AU - Takada, Kazunori

AU - Sasaki, Takayoshi

PY - 2007/10/22

Y1 - 2007/10/22

N2 - We have demonstrated a novel procedure for fabricating high-κ dielectric nanofilms by using a titania nanosheet as a building block. The layer-by-layer assembly of titania nanosheets using an atomically flat SrRuO3 substrate is advantageous as a means of fabricating atomically uniform multilayer high-κ nanofilms. High-resolution transmission electron microscopy revealed that these multilayer nanofilms are composed of a well-ordered lamellar structure without an interfacial dead layer. These nanofilms exhibited both high dielectric constant (εr ∼ 125) and low leakage current density (J < 10-7A/cm2) even for thicknesses as low as 10nm. These results indicate that the titania nanosheet is a very promising candidate as a high-κ nanoblock, and its bottom-up fabrication provides new opportunities for the development of high-κ devices.

AB - We have demonstrated a novel procedure for fabricating high-κ dielectric nanofilms by using a titania nanosheet as a building block. The layer-by-layer assembly of titania nanosheets using an atomically flat SrRuO3 substrate is advantageous as a means of fabricating atomically uniform multilayer high-κ nanofilms. High-resolution transmission electron microscopy revealed that these multilayer nanofilms are composed of a well-ordered lamellar structure without an interfacial dead layer. These nanofilms exhibited both high dielectric constant (εr ∼ 125) and low leakage current density (J < 10-7A/cm2) even for thicknesses as low as 10nm. These results indicate that the titania nanosheet is a very promising candidate as a high-κ nanoblock, and its bottom-up fabrication provides new opportunities for the development of high-κ devices.

KW - High-κ dielectrics

KW - Layer-by-layer assembly

KW - Titania nanosheet

UR - http://www.scopus.com/inward/record.url?scp=35348990866&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=35348990866&partnerID=8YFLogxK

U2 - 10.1143/JJAP.46.6979

DO - 10.1143/JJAP.46.6979

M3 - Article

AN - SCOPUS:35348990866

SN - 0021-4922

VL - 46

SP - 6979

EP - 6983

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

IS - 10 B

ER -

Solution-based fabrication of high-κ dielectric nanofilms using titania nanosheets as a building block

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this