@article{610260889ddc4bcf9d40e681525f271b,
title = "State-of-the-Art Technology and Future Prospects of Micro Thermoelectric Generator Devices",
keywords = "CMOS process, silicon, thermoelectric generator",
author = "Takanobu Watanabe",
year = "2022",
doi = "10.2493/jjspe.88.809",
language = "English",
volume = "88",
pages = "809--812",
journal = "Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering",
issn = "0912-0289",
publisher = "Japan Society for Precision Engineering",
number = "11",
}