Structural and morphological control of nanosized Cu islands on SiO 2 using a Ti underlayer

Minghui Hu; Suguru Noda; Tatsuya Okubo; Yukio Yamaguchi; Hiroshi Komiyama

doi:10.1063/1.1597972

Structural and morphological control of nanosized Cu islands on SiO ₂ using a Ti underlayer

Minghui Hu^*, Suguru Noda, Tatsuya Okubo, Yukio Yamaguchi, Hiroshi Komiyama

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

13 Citations (Scopus)

Abstract

The structural and morphological control of nanosized Cu islands on SiO₂ using a Ti underlayer were discussed. It was found that the Cu islands on Ti/SiO₂ possessed smaller sizes, shorter interisland distance and a higher number density that those on SiO₂. The analysis suggested the fabrication of nanosized islands with the desired wettability and crystalline orientation using an appropriate metal underlayer.

Original language	English
Pages (from-to)	3492-3497
Number of pages	6
Journal	Journal of Applied Physics
Volume	94
Issue number	5
DOIs	https://doi.org/10.1063/1.1597972
Publication status	Published - 2003 Sept 1
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy(all)

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10.1063/1.1597972

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title = "Structural and morphological control of nanosized Cu islands on SiO 2 using a Ti underlayer",

abstract = "The structural and morphological control of nanosized Cu islands on SiO2 using a Ti underlayer were discussed. It was found that the Cu islands on Ti/SiO2 possessed smaller sizes, shorter interisland distance and a higher number density that those on SiO2. The analysis suggested the fabrication of nanosized islands with the desired wettability and crystalline orientation using an appropriate metal underlayer.",

author = "Minghui Hu and Suguru Noda and Tatsuya Okubo and Yukio Yamaguchi and Hiroshi Komiyama",

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T1 - Structural and morphological control of nanosized Cu islands on SiO 2 using a Ti underlayer

AU - Hu, Minghui

AU - Noda, Suguru

AU - Okubo, Tatsuya

AU - Yamaguchi, Yukio

AU - Komiyama, Hiroshi

PY - 2003/9/1

Y1 - 2003/9/1

N2 - The structural and morphological control of nanosized Cu islands on SiO2 using a Ti underlayer were discussed. It was found that the Cu islands on Ti/SiO2 possessed smaller sizes, shorter interisland distance and a higher number density that those on SiO2. The analysis suggested the fabrication of nanosized islands with the desired wettability and crystalline orientation using an appropriate metal underlayer.

AB - The structural and morphological control of nanosized Cu islands on SiO2 using a Ti underlayer were discussed. It was found that the Cu islands on Ti/SiO2 possessed smaller sizes, shorter interisland distance and a higher number density that those on SiO2. The analysis suggested the fabrication of nanosized islands with the desired wettability and crystalline orientation using an appropriate metal underlayer.

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Structural and morphological control of nanosized Cu islands on SiO ₂ using a Ti underlayer

Abstract

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