Structure modification of M-AFM probe for the measurement of local conductivity

A. Fujimoto; L. Zhang; A. Hosoi; Y. Ju

Structure modification of M-AFM probe for the measurement of local conductivity

A. Fujimoto^*, L. Zhang, A. Hosoi, Y. Ju

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

In order to realize the evaluation of electrical properties of materials in nanoscale orders, a method for the measurement of local conductivity was presented. A microwave atomic force microscope (M-AFM) probe in which microwave signals can propagate was fabricated. An open structure of a waveguide at the tip of the probe was introduced by focused ion beam (FIB) fabrication. The microwave measurement system consisted of the combination of a network analyzer working at 44.5 GHz and an AFM were used to measure the samples without contact. The amplitude and phase of the reflection coefficient of the microwave signal were measured to determine the electrical conductivity of non magnetic metals. The conductivity obtained by this method agrees with that measured by the high-frequency conductometry.

Original language	English
Title of host publication	Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010
Pages	22-26
Number of pages	5
Publication status	Published - 2010 Oct 18
Externally published	Yes
Event	Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010 - Seville, Spain Duration: 2010 May 5 → 2010 May 7

Publication series

Name	Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010

Conference

Conference	Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010
Country/Territory	Spain
City	Seville
Period	10/5/5 → 10/5/7

ASJC Scopus subject areas

Electrical and Electronic Engineering

Cite this

Structure modification of M-AFM probe for the measurement of local conductivity. / Fujimoto, A.; Zhang, L.; Hosoi, A. et al.
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010. 2010. p. 22-26 5486451 (Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Fujimoto, A, Zhang, L, Hosoi, A & Ju, Y 2010, Structure modification of M-AFM probe for the measurement of local conductivity. in Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010., 5486451, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010, pp. 22-26, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010, Seville, Spain, 10/5/5.

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title = "Structure modification of M-AFM probe for the measurement of local conductivity",

abstract = "In order to realize the evaluation of electrical properties of materials in nanoscale orders, a method for the measurement of local conductivity was presented. A microwave atomic force microscope (M-AFM) probe in which microwave signals can propagate was fabricated. An open structure of a waveguide at the tip of the probe was introduced by focused ion beam (FIB) fabrication. The microwave measurement system consisted of the combination of a network analyzer working at 44.5 GHz and an AFM were used to measure the samples without contact. The amplitude and phase of the reflection coefficient of the microwave signal were measured to determine the electrical conductivity of non magnetic metals. The conductivity obtained by this method agrees with that measured by the high-frequency conductometry.",

author = "A. Fujimoto and L. Zhang and A. Hosoi and Y. Ju",

year = "2010",

month = oct,

day = "18",

language = "English",

isbn = "9782355000119",

series = "Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010",

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booktitle = "Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010",

note = "Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010 ; Conference date: 05-05-2010 Through 07-05-2010",

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T1 - Structure modification of M-AFM probe for the measurement of local conductivity

AU - Fujimoto, A.

AU - Zhang, L.

AU - Hosoi, A.

AU - Ju, Y.

PY - 2010/10/18

Y1 - 2010/10/18

N2 - In order to realize the evaluation of electrical properties of materials in nanoscale orders, a method for the measurement of local conductivity was presented. A microwave atomic force microscope (M-AFM) probe in which microwave signals can propagate was fabricated. An open structure of a waveguide at the tip of the probe was introduced by focused ion beam (FIB) fabrication. The microwave measurement system consisted of the combination of a network analyzer working at 44.5 GHz and an AFM were used to measure the samples without contact. The amplitude and phase of the reflection coefficient of the microwave signal were measured to determine the electrical conductivity of non magnetic metals. The conductivity obtained by this method agrees with that measured by the high-frequency conductometry.

AB - In order to realize the evaluation of electrical properties of materials in nanoscale orders, a method for the measurement of local conductivity was presented. A microwave atomic force microscope (M-AFM) probe in which microwave signals can propagate was fabricated. An open structure of a waveguide at the tip of the probe was introduced by focused ion beam (FIB) fabrication. The microwave measurement system consisted of the combination of a network analyzer working at 44.5 GHz and an AFM were used to measure the samples without contact. The amplitude and phase of the reflection coefficient of the microwave signal were measured to determine the electrical conductivity of non magnetic metals. The conductivity obtained by this method agrees with that measured by the high-frequency conductometry.

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M3 - Conference contribution

AN - SCOPUS:77957828105

SN - 9782355000119

T3 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010

SP - 22

EP - 26

BT - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010

T2 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010

Y2 - 5 May 2010 through 7 May 2010

ER -

Structure modification of M-AFM probe for the measurement of local conductivity

Abstract

Publication series

Conference

ASJC Scopus subject areas

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