Study on a diode-bridge type capacitance detection circuit for differential capacitive sensor

Takahiro Matsuo; Jinxing Liang; Joanna Pawlat; Toshitsugu Ueda

doi:10.1109/ICSENS.2007.355823

Study on a diode-bridge type capacitance detection circuit for differential capacitive sensor

Takahiro Matsuo^*, Jinxing Liang, Joanna Pawlat, Toshitsugu Ueda

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Citations (Scopus)

Abstract

Diode-bridge type capacitance detection circuit was developed in order to detect very small variation of differential capacitances in higher resolution. The circuit was designed for a comb structure tilt sensor, which was made of quartz crystal and had several movable electrodes between fixed electrodes. The circuit's output was almost proportional to the displacement of the movable electrode. Over 100kHz AC voltage was supplied to obtain output signal sufficiently. In order to prevent decrease of the sensitivity, the diode-bridge part was composed of commercial PIN diodes, which had very low junction capacitance (less than 1pF), and was mounted in small ceramic package with the tilt sensor. At present, the resolution of 0.0015 degree was obtained using the combination of the sensor and the detection circuit. It corresponded to the resolution of about less than 4.5aF.

Original language	English
Title of host publication	Proceedings of IEEE Sensors
Pages	1123-1126
Number of pages	4
DOIs	https://doi.org/10.1109/ICSENS.2007.355823
Publication status	Published - 2006
Event	2006 5th IEEE Conference on Sensors - Daegu Duration: 2006 Oct 22 → 2006 Oct 25

Other

Other	2006 5th IEEE Conference on Sensors
City	Daegu
Period	06/10/22 → 06/10/25

ASJC Scopus subject areas

Engineering (miscellaneous)
Electrical and Electronic Engineering

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10.1109/ICSENS.2007.355823

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title = "Study on a diode-bridge type capacitance detection circuit for differential capacitive sensor",

abstract = "Diode-bridge type capacitance detection circuit was developed in order to detect very small variation of differential capacitances in higher resolution. The circuit was designed for a comb structure tilt sensor, which was made of quartz crystal and had several movable electrodes between fixed electrodes. The circuit's output was almost proportional to the displacement of the movable electrode. Over 100kHz AC voltage was supplied to obtain output signal sufficiently. In order to prevent decrease of the sensitivity, the diode-bridge part was composed of commercial PIN diodes, which had very low junction capacitance (less than 1pF), and was mounted in small ceramic package with the tilt sensor. At present, the resolution of 0.0015 degree was obtained using the combination of the sensor and the detection circuit. It corresponded to the resolution of about less than 4.5aF.",

author = "Takahiro Matsuo and Jinxing Liang and Joanna Pawlat and Toshitsugu Ueda",

year = "2006",

doi = "10.1109/ICSENS.2007.355823",

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isbn = "1424403766",

pages = "1123--1126",

booktitle = "Proceedings of IEEE Sensors",

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AU - Matsuo, Takahiro

AU - Liang, Jinxing

AU - Pawlat, Joanna

AU - Ueda, Toshitsugu

PY - 2006

Y1 - 2006

N2 - Diode-bridge type capacitance detection circuit was developed in order to detect very small variation of differential capacitances in higher resolution. The circuit was designed for a comb structure tilt sensor, which was made of quartz crystal and had several movable electrodes between fixed electrodes. The circuit's output was almost proportional to the displacement of the movable electrode. Over 100kHz AC voltage was supplied to obtain output signal sufficiently. In order to prevent decrease of the sensitivity, the diode-bridge part was composed of commercial PIN diodes, which had very low junction capacitance (less than 1pF), and was mounted in small ceramic package with the tilt sensor. At present, the resolution of 0.0015 degree was obtained using the combination of the sensor and the detection circuit. It corresponded to the resolution of about less than 4.5aF.

AB - Diode-bridge type capacitance detection circuit was developed in order to detect very small variation of differential capacitances in higher resolution. The circuit was designed for a comb structure tilt sensor, which was made of quartz crystal and had several movable electrodes between fixed electrodes. The circuit's output was almost proportional to the displacement of the movable electrode. Over 100kHz AC voltage was supplied to obtain output signal sufficiently. In order to prevent decrease of the sensitivity, the diode-bridge part was composed of commercial PIN diodes, which had very low junction capacitance (less than 1pF), and was mounted in small ceramic package with the tilt sensor. At present, the resolution of 0.0015 degree was obtained using the combination of the sensor and the detection circuit. It corresponded to the resolution of about less than 4.5aF.

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BT - Proceedings of IEEE Sensors

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ER -

Study on a diode-bridge type capacitance detection circuit for differential capacitive sensor

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