Surface topography of sputtered CuxMo6S8 films

R. Ohtaki; B. R. Zhao; H. L. Luo; N. M. Davis

doi:10.1016/0025-5408(82)90038-1

Surface topography of sputtered Cu_xMo₆S₈ films

R. Ohtaki^*, B. R. Zhao, H. L. Luo, N. M. Davis

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

The Chevrel phase Cu_xMo₆S₈ was prepared with the technique of sputtering, and its surface micro-structure was observed using scanning electron microscopes (SEM). It was found that the surface micro-structure depends strongly on the sputtering conditions, particularly on the substrate temperature. An attempt to obtain smooth film surfaces for analytical purposes was successful.

Original language	English
Pages (from-to)	575-578
Number of pages	4
Journal	Materials Research Bulletin
Volume	17
Issue number	5
DOIs	https://doi.org/10.1016/0025-5408(82)90038-1
Publication status	Published - 1982 May
Externally published	Yes

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Access to Document

10.1016/0025-5408(82)90038-1

Cite this

@article{33e21a0a1de14627bc82bb90d3cd5561,

title = "Surface topography of sputtered CuxMo6S8 films",

abstract = "The Chevrel phase CuxMo6S8 was prepared with the technique of sputtering, and its surface micro-structure was observed using scanning electron microscopes (SEM). It was found that the surface micro-structure depends strongly on the sputtering conditions, particularly on the substrate temperature. An attempt to obtain smooth film surfaces for analytical purposes was successful.",

author = "R. Ohtaki and Zhao, {B. R.} and Luo, {H. L.} and Davis, {N. M.}",

note = "Funding Information: *Supported by the NSF Grant #DMR-8108421.",

year = "1982",

month = may,

doi = "10.1016/0025-5408(82)90038-1",

language = "English",

volume = "17",

pages = "575--578",

journal = "Materials Research Bulletin",

issn = "0025-5408",

publisher = "Elsevier Ltd",

number = "5",

}

TY - JOUR

T1 - Surface topography of sputtered CuxMo6S8 films

AU - Ohtaki, R.

AU - Zhao, B. R.

AU - Luo, H. L.

AU - Davis, N. M.

N1 - Funding Information: *Supported by the NSF Grant #DMR-8108421.

PY - 1982/5

Y1 - 1982/5

N2 - The Chevrel phase CuxMo6S8 was prepared with the technique of sputtering, and its surface micro-structure was observed using scanning electron microscopes (SEM). It was found that the surface micro-structure depends strongly on the sputtering conditions, particularly on the substrate temperature. An attempt to obtain smooth film surfaces for analytical purposes was successful.

AB - The Chevrel phase CuxMo6S8 was prepared with the technique of sputtering, and its surface micro-structure was observed using scanning electron microscopes (SEM). It was found that the surface micro-structure depends strongly on the sputtering conditions, particularly on the substrate temperature. An attempt to obtain smooth film surfaces for analytical purposes was successful.

UR - http://www.scopus.com/inward/record.url?scp=0020136987&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0020136987&partnerID=8YFLogxK

U2 - 10.1016/0025-5408(82)90038-1

DO - 10.1016/0025-5408(82)90038-1

M3 - Article

AN - SCOPUS:0020136987

SN - 0025-5408

VL - 17

SP - 575

EP - 578

JO - Materials Research Bulletin

JF - Materials Research Bulletin

IS - 5

ER -

Surface topography of sputtered Cu_xMo₆S₈ films

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this