Synchronous modulation in scanning Auger electron microscopy

K. Goto; S. Ichimura; R. Shimizu

doi:10.1063/1.1135666

Synchronous modulation in scanning Auger electron microscopy

K. Goto^*, S. Ichimura, R. Shimizu

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

The modulation frequency on the cylindrical mirror analyzer of a scanning Auger microscope has been synchronized to the digital scanning system. This technique allows one to obtain an Auger image free from moiré patterns which arise from the beat between scanning and modulation frequencies, and permits operation at frequency settings which optimize use of the electronics in the detection system.

Original language	English
Pages (from-to)	46-47
Number of pages	2
Journal	Review of Scientific Instruments
Volume	50
Issue number	1
DOIs	https://doi.org/10.1063/1.1135666
Publication status	Published - 1979
Externally published	Yes

ASJC Scopus subject areas

Instrumentation

Access to Document

10.1063/1.1135666

Cite this

@article{ea108473dee547aab8ba331629df0188,

title = "Synchronous modulation in scanning Auger electron microscopy",

abstract = "The modulation frequency on the cylindrical mirror analyzer of a scanning Auger microscope has been synchronized to the digital scanning system. This technique allows one to obtain an Auger image free from moir{\'e} patterns which arise from the beat between scanning and modulation frequencies, and permits operation at frequency settings which optimize use of the electronics in the detection system.",

author = "K. Goto and S. Ichimura and R. Shimizu",

year = "1979",

doi = "10.1063/1.1135666",

language = "English",

volume = "50",

pages = "46--47",

journal = "Review of Scientific Instruments",

issn = "0034-6748",

publisher = "American Institute of Physics Publising LLC",

number = "1",

}

TY - JOUR

T1 - Synchronous modulation in scanning Auger electron microscopy

AU - Goto, K.

AU - Ichimura, S.

AU - Shimizu, R.

PY - 1979

Y1 - 1979

N2 - The modulation frequency on the cylindrical mirror analyzer of a scanning Auger microscope has been synchronized to the digital scanning system. This technique allows one to obtain an Auger image free from moiré patterns which arise from the beat between scanning and modulation frequencies, and permits operation at frequency settings which optimize use of the electronics in the detection system.

AB - The modulation frequency on the cylindrical mirror analyzer of a scanning Auger microscope has been synchronized to the digital scanning system. This technique allows one to obtain an Auger image free from moiré patterns which arise from the beat between scanning and modulation frequencies, and permits operation at frequency settings which optimize use of the electronics in the detection system.

UR - http://www.scopus.com/inward/record.url?scp=36749106703&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=36749106703&partnerID=8YFLogxK

U2 - 10.1063/1.1135666

DO - 10.1063/1.1135666

M3 - Article

AN - SCOPUS:36749106703

SN - 0034-6748

VL - 50

SP - 46

EP - 47

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 1

ER -

Synchronous modulation in scanning Auger electron microscopy

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this