Tapered waveguide by liquid for a coupler of optical fibers to mems devices

Hisashi Terae; Binh Khiem Nguyen; Tomoyuki Takahata; Eiji Iwase; Kiyoshi Matsumoto; Isao Shimoyama

doi:10.1109/MEMSYS.2008.4443776

Tapered waveguide by liquid for a coupler of optical fibers to mems devices

Hisashi Terae^*, Binh Khiem Nguyen, Tomoyuki Takahata, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

We report a tapered liquid waveguide for an optical fiber-to-chip coupler. The tapered liquid waveguide has a smooth surface and has both a large structure and a micro structure on one chip. The waveguide is able to couple optical fibers of large-diameter to small MEMS devices. A Parylene film on the liquid prevented the liquid from deformation and evaporation. We fabricated the silicone oil waveguide by hydrophobicity of CYTOP. We measured a propagation loss of the tapered waveguide by entering the laser beam from the incident face. From a measurement result, this tapered waveguide can be a coupler which connects optical fibers to MEMS devices.

Original language	English
Title of host publication	MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
Pages	794-797
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2008.4443776
Publication status	Published - 2008
Externally published	Yes
Event	21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States Duration: 2008 Jan 13 → 2008 Jan 17

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
Country/Territory	United States
City	Tucson, AZ
Period	08/1/13 → 08/1/17

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2008.4443776

Cite this

Terae, H., Nguyen, B. K., Takahata, T., Iwase, E., Matsumoto, K., & Shimoyama, I. (2008). Tapered waveguide by liquid for a coupler of optical fibers to mems devices. In MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems (pp. 794-797). [4443776] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2008.4443776

Tapered waveguide by liquid for a coupler of optical fibers to mems devices. / Terae, Hisashi; Nguyen, Binh Khiem; Takahata, Tomoyuki et al.
MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems. 2008. p. 794-797 4443776 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Terae, H, Nguyen, BK, Takahata, T, Iwase, E, Matsumoto, K & Shimoyama, I 2008, Tapered waveguide by liquid for a coupler of optical fibers to mems devices. in MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems., 4443776, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 794-797, 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson, Tucson, AZ, United States, 08/1/13. https://doi.org/10.1109/MEMSYS.2008.4443776

Terae H, Nguyen BK, Takahata T, Iwase E, Matsumoto K, Shimoyama I. Tapered waveguide by liquid for a coupler of optical fibers to mems devices. In MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems. 2008. p. 794-797. 4443776. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2008.4443776

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abstract = "We report a tapered liquid waveguide for an optical fiber-to-chip coupler. The tapered liquid waveguide has a smooth surface and has both a large structure and a micro structure on one chip. The waveguide is able to couple optical fibers of large-diameter to small MEMS devices. A Parylene film on the liquid prevented the liquid from deformation and evaporation. We fabricated the silicone oil waveguide by hydrophobicity of CYTOP. We measured a propagation loss of the tapered waveguide by entering the laser beam from the incident face. From a measurement result, this tapered waveguide can be a coupler which connects optical fibers to MEMS devices.",

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AB - We report a tapered liquid waveguide for an optical fiber-to-chip coupler. The tapered liquid waveguide has a smooth surface and has both a large structure and a micro structure on one chip. The waveguide is able to couple optical fibers of large-diameter to small MEMS devices. A Parylene film on the liquid prevented the liquid from deformation and evaporation. We fabricated the silicone oil waveguide by hydrophobicity of CYTOP. We measured a propagation loss of the tapered waveguide by entering the laser beam from the incident face. From a measurement result, this tapered waveguide can be a coupler which connects optical fibers to MEMS devices.

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Tapered waveguide by liquid for a coupler of optical fibers to mems devices

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