TEM analysis on nanovoid formation in annealed amorphous oxides

Ryusuke Nakamura; Takehiro Shudo; Akihiko Hirata; Manabu Ishimaru; Hideo Nakajima

doi:10.4028/www.scientific.net/MSF.695.541

TEM analysis on nanovoid formation in annealed amorphous oxides

Ryusuke Nakamura^*, Takehiro Shudo, Akihiko Hirata, Manabu Ishimaru, Hideo Nakajima

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Formation behavior of nanovoids during the annealing of amorphous Al ₂O₃ and WO₃ was studied by transmission electron microscopy. The density and size of the voids in Al₂O ₃ and WO₃ increase with increasing annealing temperature from 973 to 1123 K and from 573 to 673 K, respectively. It is suggested that the formation of nanovoids during annealing is attributed to the large difference in density between as-deposited amorphous and crystalline oxides.

Original language	English
Title of host publication	Eco-Materials Processing and Design XII
Publisher	Trans Tech Publications Ltd
Pages	541-544
Number of pages	4
ISBN (Print)	9783037852224
DOIs	https://doi.org/10.4028/www.scientific.net/MSF.695.541
Publication status	Published - 2011
Externally published	Yes

Publication series

Name	Materials Science Forum
Volume	695
ISSN (Print)	0255-5476
ISSN (Electronic)	1662-9752

Keywords

Amorphous oxides
Crystallization
Nanoporous

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.4028/www.scientific.net/MSF.695.541

Cite this

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title = "TEM analysis on nanovoid formation in annealed amorphous oxides",

abstract = "Formation behavior of nanovoids during the annealing of amorphous Al 2O3 and WO3 was studied by transmission electron microscopy. The density and size of the voids in Al2O 3 and WO3 increase with increasing annealing temperature from 973 to 1123 K and from 573 to 673 K, respectively. It is suggested that the formation of nanovoids during annealing is attributed to the large difference in density between as-deposited amorphous and crystalline oxides.",

keywords = "Amorphous oxides, Crystallization, Nanoporous",

author = "Ryusuke Nakamura and Takehiro Shudo and Akihiko Hirata and Manabu Ishimaru and Hideo Nakajima",

year = "2011",

doi = "10.4028/www.scientific.net/MSF.695.541",

language = "English",

isbn = "9783037852224",

series = "Materials Science Forum",

publisher = "Trans Tech Publications Ltd",

pages = "541--544",

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T1 - TEM analysis on nanovoid formation in annealed amorphous oxides

AU - Nakamura, Ryusuke

AU - Shudo, Takehiro

AU - Hirata, Akihiko

AU - Ishimaru, Manabu

AU - Nakajima, Hideo

PY - 2011

Y1 - 2011

N2 - Formation behavior of nanovoids during the annealing of amorphous Al 2O3 and WO3 was studied by transmission electron microscopy. The density and size of the voids in Al2O 3 and WO3 increase with increasing annealing temperature from 973 to 1123 K and from 573 to 673 K, respectively. It is suggested that the formation of nanovoids during annealing is attributed to the large difference in density between as-deposited amorphous and crystalline oxides.

AB - Formation behavior of nanovoids during the annealing of amorphous Al 2O3 and WO3 was studied by transmission electron microscopy. The density and size of the voids in Al2O 3 and WO3 increase with increasing annealing temperature from 973 to 1123 K and from 573 to 673 K, respectively. It is suggested that the formation of nanovoids during annealing is attributed to the large difference in density between as-deposited amorphous and crystalline oxides.

KW - Amorphous oxides

KW - Crystallization

KW - Nanoporous

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UR - http://www.scopus.com/inward/citedby.url?scp=80053272902&partnerID=8YFLogxK

U2 - 10.4028/www.scientific.net/MSF.695.541

DO - 10.4028/www.scientific.net/MSF.695.541

M3 - Conference contribution

AN - SCOPUS:80053272902

SN - 9783037852224

T3 - Materials Science Forum

SP - 541

EP - 544

BT - Eco-Materials Processing and Design XII

PB - Trans Tech Publications Ltd

ER -

TEM analysis on nanovoid formation in annealed amorphous oxides

Abstract

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Keywords

ASJC Scopus subject areas

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