TEM observation of microstructures in RF-sputtered Sm-Fe magnetic thin films

Hong Sun; Yutaka Itoh; Kenji Hanafusa; Kazuhito Kamei; Toshiro Tomida

TEM observation of microstructures in RF-sputtered Sm-Fe magnetic thin films

Hong Sun^*, Yutaka Itoh, Kenji Hanafusa, Kazuhito Kamei, Toshiro Tomida

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Abstract

The planar-view and cross-sectional microstructures of binary Sm-Fe magnetic thin films deposited on quartz glass substrates by the RF-sputtering method are investigated using a transmission electron microscope (TEM). The cross-sectional micrographs and TEM diffraction patterns show decent columnar structures in the films and special crystallographic orientations. The magnetic properties of Sm-Fe thin films can also be well explained by their microstructural characteristics.

Original language	English
Pages (from-to)	458-460
Number of pages	3
Journal	Journal of Electron Microscopy
Volume	45
Issue number	5
Publication status	Published - 1996
Externally published	Yes

Keywords

Magnetic
Microstructure
Sm-Fe
TEM
Thin film

ASJC Scopus subject areas

Instrumentation

Cite this

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title = "TEM observation of microstructures in RF-sputtered Sm-Fe magnetic thin films",

abstract = "The planar-view and cross-sectional microstructures of binary Sm-Fe magnetic thin films deposited on quartz glass substrates by the RF-sputtering method are investigated using a transmission electron microscope (TEM). The cross-sectional micrographs and TEM diffraction patterns show decent columnar structures in the films and special crystallographic orientations. The magnetic properties of Sm-Fe thin films can also be well explained by their microstructural characteristics.",

keywords = "Magnetic, Microstructure, Sm-Fe, TEM, Thin film",

author = "Hong Sun and Yutaka Itoh and Kenji Hanafusa and Kazuhito Kamei and Toshiro Tomida",

year = "1996",

language = "English",

volume = "45",

pages = "458--460",

journal = "Journal of Electron Microscopy",

issn = "0022-0744",

publisher = "Japanese Society of Microscopy",

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T1 - TEM observation of microstructures in RF-sputtered Sm-Fe magnetic thin films

AU - Sun, Hong

AU - Itoh, Yutaka

AU - Hanafusa, Kenji

AU - Kamei, Kazuhito

AU - Tomida, Toshiro

PY - 1996

Y1 - 1996

N2 - The planar-view and cross-sectional microstructures of binary Sm-Fe magnetic thin films deposited on quartz glass substrates by the RF-sputtering method are investigated using a transmission electron microscope (TEM). The cross-sectional micrographs and TEM diffraction patterns show decent columnar structures in the films and special crystallographic orientations. The magnetic properties of Sm-Fe thin films can also be well explained by their microstructural characteristics.

AB - The planar-view and cross-sectional microstructures of binary Sm-Fe magnetic thin films deposited on quartz glass substrates by the RF-sputtering method are investigated using a transmission electron microscope (TEM). The cross-sectional micrographs and TEM diffraction patterns show decent columnar structures in the films and special crystallographic orientations. The magnetic properties of Sm-Fe thin films can also be well explained by their microstructural characteristics.

KW - Magnetic

KW - Microstructure

KW - Sm-Fe

KW - TEM

KW - Thin film

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M3 - Article

AN - SCOPUS:6144292009

SN - 0022-0744

VL - 45

SP - 458

EP - 460

JO - Journal of Electron Microscopy

JF - Journal of Electron Microscopy

IS - 5

ER -

TEM observation of microstructures in RF-sputtered Sm-Fe magnetic thin films

Abstract

Keywords

ASJC Scopus subject areas

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