TY - GEN
T1 - Temperature characteristics of pure shear mode FBARs consisting of (112̄0) textured ZnO films
AU - Yanagitani, Takahiko
AU - Kiuchi, Masato
AU - Matsukawa, Mami
AU - Watanabe, Yoshiaki
PY - 2006/12/1
Y1 - 2006/12/1
N2 - Thickness extensional mode FBAR consisting of (0001) textured ZnO films and pure thickness shear mode FBAR consisting of (112̄0) textured ZnO films were fabricated. Temperature coefficients of frequency (TCF) of these FBARs were measured in the temperature range of 10-60 °C. In both of the resonators, the parallel resonant frequencies varied linearly with temperature. The TCF were determined as -63.1 [ppm/°C] for thickness extensional mode resonator and -34.7 [ppm/°C] for pure-shear mode resonator.
AB - Thickness extensional mode FBAR consisting of (0001) textured ZnO films and pure thickness shear mode FBAR consisting of (112̄0) textured ZnO films were fabricated. Temperature coefficients of frequency (TCF) of these FBARs were measured in the temperature range of 10-60 °C. In both of the resonators, the parallel resonant frequencies varied linearly with temperature. The TCF were determined as -63.1 [ppm/°C] for thickness extensional mode resonator and -34.7 [ppm/°C] for pure-shear mode resonator.
KW - (11-20) textured ZnO film
KW - Component
KW - Pure shear mode FBAR
KW - Temperature coefficient of frequency
UR - http://www.scopus.com/inward/record.url?scp=78649348233&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=78649348233&partnerID=8YFLogxK
U2 - 10.1109/ULTSYM.2006.367
DO - 10.1109/ULTSYM.2006.367
M3 - Conference contribution
AN - SCOPUS:78649348233
SN - 1424402018
SN - 9781424402014
T3 - Proceedings - IEEE Ultrasonics Symposium
SP - 1459
EP - 1462
BT - 2006 IEEE International Ultrasonics Symposium, IUS
ER -