The design of MEMS scanner for the three dimensional actuation with a pair of beams

Yohei Oguchi; Chisa Iino; Eiji Iwase

doi:10.1541/ieejsmas.136.448

The design of MEMS scanner for the three dimensional actuation with a pair of beams

Yohei Oguchi, Chisa Iino, Eiji Iwase^*

^*Corresponding author for this work

School of Fundamental Science and Engineering

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

We propose the design for three-dimensional (3-D) scanning micromirror with single pair of beams. A 3-D scanning micromirror is powerful solution for projection/detection of a 3-D image in tiny devices. We succeed in designing and fabricating the micromirror having three separated resonance modes (two torsion modes and one parallel mode) with high fill-factor. Our design of single pair of beams can contribute to simpleness and compactness of a 3-D scanner because of easy fabrication and high fill-factor.

Original language	English
Pages (from-to)	448-453
Number of pages	6
Journal	ieej transactions on sensors and micromachines
Volume	136
Issue number	10
DOIs	https://doi.org/10.1541/ieejsmas.136.448
Publication status	Published - 2016

Keywords

3-D actuation
Beam design
MEMS scanner
Resonant frequency

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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10.1541/ieejsmas.136.448

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title = "The design of MEMS scanner for the three dimensional actuation with a pair of beams",

abstract = "We propose the design for three-dimensional (3-D) scanning micromirror with single pair of beams. A 3-D scanning micromirror is powerful solution for projection/detection of a 3-D image in tiny devices. We succeed in designing and fabricating the micromirror having three separated resonance modes (two torsion modes and one parallel mode) with high fill-factor. Our design of single pair of beams can contribute to simpleness and compactness of a 3-D scanner because of easy fabrication and high fill-factor.",

keywords = "3-D actuation, Beam design, MEMS scanner, Resonant frequency",

author = "Yohei Oguchi and Chisa Iino and Eiji Iwase",

note = "Publisher Copyright: {\textcopyright} 2016 The Institute of Electrical Engineers of Japan.",

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AU - Iino, Chisa

AU - Iwase, Eiji

PY - 2016

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N2 - We propose the design for three-dimensional (3-D) scanning micromirror with single pair of beams. A 3-D scanning micromirror is powerful solution for projection/detection of a 3-D image in tiny devices. We succeed in designing and fabricating the micromirror having three separated resonance modes (two torsion modes and one parallel mode) with high fill-factor. Our design of single pair of beams can contribute to simpleness and compactness of a 3-D scanner because of easy fabrication and high fill-factor.

AB - We propose the design for three-dimensional (3-D) scanning micromirror with single pair of beams. A 3-D scanning micromirror is powerful solution for projection/detection of a 3-D image in tiny devices. We succeed in designing and fabricating the micromirror having three separated resonance modes (two torsion modes and one parallel mode) with high fill-factor. Our design of single pair of beams can contribute to simpleness and compactness of a 3-D scanner because of easy fabrication and high fill-factor.

KW - 3-D actuation

KW - Beam design

KW - MEMS scanner

KW - Resonant frequency

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The design of MEMS scanner for the three dimensional actuation with a pair of beams

Abstract

Keywords

ASJC Scopus subject areas

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