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The Impact of High Pressure Dry O2 Oxidation on Sub-Quarter Micron Planarized LOCOS
T. Yamashita, T. Kuroi, T. Uchida, S. Komori, K. Kobayashi, M. Inuishi, H. Miyoshi
Research output: Contribution to journal › Conference article › peer-review
1
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(Scopus)