The reliability of quantitative analysis with AES

K. Yoshihara; R. Shimizu; T. Homma; H. Tokutaka; K. Goto; D. Fujita; A. Kurokawa; S. Ichimura; M. Kurahashi; M. Kudo; Y. Hashiguchi; T. Suzuki; T. Ohmura; F. Soeda; K. Tanaka; A. Tanaka; T. Sekine; Y. Shiokawa; T. Hayashi

doi:10.1002/sia.740160127

The reliability of quantitative analysis with AES

K. Yoshihara^*, R. Shimizu, T. Homma, H. Tokutaka, K. Goto, D. Fujita, A. Kurokawa, S. Ichimura, M. Kurahashi, M. Kudo, Y. Hashiguchi, T. Suzuki, T. Ohmura, F. Soeda, K. Tanaka, A. Tanaka, T. Sekine, Y. Shiokawa, T. Hayashi

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

16 Citations (Scopus)

Abstract

The Japanese VAMAS‐SCA working group is composed of 19 institutes. Three kind of AuCu alloys (Au 75 at.‐%–Cu 25 at.‐%, Au 50 at.‐%–Cu 50 at.‐%, Au 25 at.‐%–Cu 75 at.‐%) were prepared, and these specimens, pure Au and pure Cu were distributed to the members of the VAMAS‐SCA working group. The surface concentrations of these alloys were calculated from the Auger peak amplitudes in two ways. One method used the published relative sensitivity factors, and the other used pure Au and Pure Cu as the standard materials. The mean values of the surface concentrations calculated with the published relative sensitivity factors were almost the same as those calculated with the standard materials. This means that the published relative sensitivity factors are reliable to some extent. The error of the surface concentration calculated with pure Au and pure Cu as the standard materials lay between about 3% and 10%, and that with the relative sensitivity factors lay between about 7% and 20%. The calculated surface concentrations of Au were larger than the bulk concentrations of Au when the matrix effect was neglected.

Original language	English
Pages (from-to)	140-143
Number of pages	4
Journal	Surface and Interface Analysis
Volume	16
Issue number	1-12
DOIs	https://doi.org/10.1002/sia.740160127
Publication status	Published - 1990 Jul
Externally published	Yes

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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Yoshihara, K., Shimizu, R., Homma, T., Tokutaka, H., Goto, K., Fujita, D., Kurokawa, A., Ichimura, S., Kurahashi, M., Kudo, M., Hashiguchi, Y., Suzuki, T., Ohmura, T., Soeda, F., Tanaka, K., Tanaka, A., Sekine, T., Shiokawa, Y., & Hayashi, T. (1990). The reliability of quantitative analysis with AES. Surface and Interface Analysis, 16(1-12), 140-143. https://doi.org/10.1002/sia.740160127

Yoshihara, K, Shimizu, R, Homma, T, Tokutaka, H, Goto, K, Fujita, D, Kurokawa, A, Ichimura, S, Kurahashi, M, Kudo, M, Hashiguchi, Y, Suzuki, T, Ohmura, T, Soeda, F, Tanaka, K, Tanaka, A, Sekine, T, Shiokawa, Y & Hayashi, T 1990, 'The reliability of quantitative analysis with AES', Surface and Interface Analysis, vol. 16, no. 1-12, pp. 140-143. https://doi.org/10.1002/sia.740160127

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title = "The reliability of quantitative analysis with AES",

abstract = "The Japanese VAMAS‐SCA working group is composed of 19 institutes. Three kind of AuCu alloys (Au 75 at.‐%–Cu 25 at.‐%, Au 50 at.‐%–Cu 50 at.‐%, Au 25 at.‐%–Cu 75 at.‐%) were prepared, and these specimens, pure Au and pure Cu were distributed to the members of the VAMAS‐SCA working group. The surface concentrations of these alloys were calculated from the Auger peak amplitudes in two ways. One method used the published relative sensitivity factors, and the other used pure Au and Pure Cu as the standard materials. The mean values of the surface concentrations calculated with the published relative sensitivity factors were almost the same as those calculated with the standard materials. This means that the published relative sensitivity factors are reliable to some extent. The error of the surface concentration calculated with pure Au and pure Cu as the standard materials lay between about 3% and 10%, and that with the relative sensitivity factors lay between about 7% and 20%. The calculated surface concentrations of Au were larger than the bulk concentrations of Au when the matrix effect was neglected.",

author = "K. Yoshihara and R. Shimizu and T. Homma and H. Tokutaka and K. Goto and D. Fujita and A. Kurokawa and S. Ichimura and M. Kurahashi and M. Kudo and Y. Hashiguchi and T. Suzuki and T. Ohmura and F. Soeda and K. Tanaka and A. Tanaka and T. Sekine and Y. Shiokawa and T. Hayashi",

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AU - Yoshihara, K.

AU - Shimizu, R.

AU - Homma, T.

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AU - Fujita, D.

AU - Kurokawa, A.

AU - Ichimura, S.

AU - Kurahashi, M.

AU - Kudo, M.

AU - Hashiguchi, Y.

AU - Suzuki, T.

AU - Ohmura, T.

AU - Soeda, F.

AU - Tanaka, K.

AU - Tanaka, A.

AU - Sekine, T.

AU - Shiokawa, Y.

AU - Hayashi, T.

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N2 - The Japanese VAMAS‐SCA working group is composed of 19 institutes. Three kind of AuCu alloys (Au 75 at.‐%–Cu 25 at.‐%, Au 50 at.‐%–Cu 50 at.‐%, Au 25 at.‐%–Cu 75 at.‐%) were prepared, and these specimens, pure Au and pure Cu were distributed to the members of the VAMAS‐SCA working group. The surface concentrations of these alloys were calculated from the Auger peak amplitudes in two ways. One method used the published relative sensitivity factors, and the other used pure Au and Pure Cu as the standard materials. The mean values of the surface concentrations calculated with the published relative sensitivity factors were almost the same as those calculated with the standard materials. This means that the published relative sensitivity factors are reliable to some extent. The error of the surface concentration calculated with pure Au and pure Cu as the standard materials lay between about 3% and 10%, and that with the relative sensitivity factors lay between about 7% and 20%. The calculated surface concentrations of Au were larger than the bulk concentrations of Au when the matrix effect was neglected.

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The reliability of quantitative analysis with AES

Abstract

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