The reliability of quantitative analysis with AES

K. Yoshihara*, R. Shimizu, T. Homma, H. Tokutaka, K. Goto, D. Fujita, A. Kurokawa, S. Ichimura, M. Kurahashi, M. Kudo, Y. Hashiguchi, T. Suzuki, T. Ohmura, F. Soeda, K. Tanaka, A. Tanaka, T. Sekine, Y. Shiokawa, T. Hayashi

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)


The Japanese VAMAS‐SCA working group is composed of 19 institutes. Three kind of AuCu alloys (Au 75 at.‐%–Cu 25 at.‐%, Au 50 at.‐%–Cu 50 at.‐%, Au 25 at.‐%–Cu 75 at.‐%) were prepared, and these specimens, pure Au and pure Cu were distributed to the members of the VAMAS‐SCA working group. The surface concentrations of these alloys were calculated from the Auger peak amplitudes in two ways. One method used the published relative sensitivity factors, and the other used pure Au and Pure Cu as the standard materials. The mean values of the surface concentrations calculated with the published relative sensitivity factors were almost the same as those calculated with the standard materials. This means that the published relative sensitivity factors are reliable to some extent. The error of the surface concentration calculated with pure Au and pure Cu as the standard materials lay between about 3% and 10%, and that with the relative sensitivity factors lay between about 7% and 20%. The calculated surface concentrations of Au were larger than the bulk concentrations of Au when the matrix effect was neglected.

Original languageEnglish
Pages (from-to)140-143
Number of pages4
JournalSurface and Interface Analysis
Issue number1-12
Publication statusPublished - 1990 Jul
Externally publishedYes

ASJC Scopus subject areas

  • General Chemistry
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry


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