Thin film stack transducer for simultaneous generation of longitudinal and shear waves at same frequency

Takahiko Yanagitani*, Takuya Matsuo, Mami Matsukawa, Watanabe Yoshiaki

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)


It is difficult to generate longitudinal and shear bulk waves simultaneously at same frequency. In this study, we propose new film stack transducer structure consisting of two layers of c-axis 23°-tilted ZnO films. The upper layer and lower layer in the stack have same thicknesses, and the c-axis tilt direction in the both layers are symmetric with respect to the film surface normal. This film stack transducers were fabricated on silica glass substrate by using RF magnetron sputtering technique. Crystallographic properties of the transducer were determined by XRD pole figure analysis. Detailed conversion loss characteristics of the transducer were also discussed. Simultaneous generation of both waves at same frequency was then experimentally demonstrated in the VHF range. We also included thin film fabrication technique for obtaining two layers of c-axis-tilted ZnO films with good crystalline orientation.

Original languageEnglish
Title of host publication2007 IEEE Ultrasonics Symposium Proceedings, IUS
Number of pages4
Publication statusPublished - 2007 Dec 1
Externally publishedYes
Event2007 IEEE Ultrasonics Symposium, IUS - New York, NY, United States
Duration: 2007 Oct 282007 Oct 31

Publication series

NameProceedings - IEEE Ultrasonics Symposium
ISSN (Print)1051-0117


Other2007 IEEE Ultrasonics Symposium, IUS
Country/TerritoryUnited States
CityNew York, NY


  • Simultaneous generation of longitudinal and shear waves
  • Ultrasonic transducer in the VHF range
  • c-axis-tilted ZnO film

ASJC Scopus subject areas

  • Acoustics and Ultrasonics


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