TY - GEN
T1 - Thin film stack transducer for simultaneous generation of longitudinal and shear waves at same frequency
AU - Yanagitani, Takahiko
AU - Matsuo, Takuya
AU - Matsukawa, Mami
AU - Yoshiaki, Watanabe
PY - 2007/12/1
Y1 - 2007/12/1
N2 - It is difficult to generate longitudinal and shear bulk waves simultaneously at same frequency. In this study, we propose new film stack transducer structure consisting of two layers of c-axis 23°-tilted ZnO films. The upper layer and lower layer in the stack have same thicknesses, and the c-axis tilt direction in the both layers are symmetric with respect to the film surface normal. This film stack transducers were fabricated on silica glass substrate by using RF magnetron sputtering technique. Crystallographic properties of the transducer were determined by XRD pole figure analysis. Detailed conversion loss characteristics of the transducer were also discussed. Simultaneous generation of both waves at same frequency was then experimentally demonstrated in the VHF range. We also included thin film fabrication technique for obtaining two layers of c-axis-tilted ZnO films with good crystalline orientation.
AB - It is difficult to generate longitudinal and shear bulk waves simultaneously at same frequency. In this study, we propose new film stack transducer structure consisting of two layers of c-axis 23°-tilted ZnO films. The upper layer and lower layer in the stack have same thicknesses, and the c-axis tilt direction in the both layers are symmetric with respect to the film surface normal. This film stack transducers were fabricated on silica glass substrate by using RF magnetron sputtering technique. Crystallographic properties of the transducer were determined by XRD pole figure analysis. Detailed conversion loss characteristics of the transducer were also discussed. Simultaneous generation of both waves at same frequency was then experimentally demonstrated in the VHF range. We also included thin film fabrication technique for obtaining two layers of c-axis-tilted ZnO films with good crystalline orientation.
KW - Simultaneous generation of longitudinal and shear waves
KW - Ultrasonic transducer in the VHF range
KW - c-axis-tilted ZnO film
UR - http://www.scopus.com/inward/record.url?scp=48149102458&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=48149102458&partnerID=8YFLogxK
U2 - 10.1109/ULTSYM.2007.471
DO - 10.1109/ULTSYM.2007.471
M3 - Conference contribution
AN - SCOPUS:48149102458
SN - 1424413834
SN - 9781424413836
T3 - Proceedings - IEEE Ultrasonics Symposium
SP - 1874
EP - 1877
BT - 2007 IEEE Ultrasonics Symposium Proceedings, IUS
T2 - 2007 IEEE Ultrasonics Symposium, IUS
Y2 - 28 October 2007 through 31 October 2007
ER -