Transparent conductive Al and Ga doped ZnO films deposited using off-axis sputtering

Junjun Jia; Aya Yoshimura; Yukihiro Kagoya; Nobuto Oka; Yuzo Shigesato

doi:10.1016/j.tsf.2014.02.005

Transparent conductive Al and Ga doped ZnO films deposited using off-axis sputtering

Junjun Jia, Aya Yoshimura, Yukihiro Kagoya, Nobuto Oka, Yuzo Shigesato^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

18 Citations (Scopus)

Abstract

Al and Ga doped ZnO (AZO and GZO) films were deposited using an off-axis dc magnetron sputtering method. At the off-axis positions, both the mobility and carrier density increased, resulting in enhanced conductivity of both the AZO and GZO films due to an increase in the crystallinity. The lowest resistivities of the AZO and GZO films deposited at room temperature were 1.1 × 10 ^{- 3} Ω cm and 6.5 × 10^{- 4} Ω cm, respectively. Increasing the substrate temperature up to 130 °C led to a decrease in the lowest resistivity to 6.1 × 10^{- 4} Ω cm for the AZO films. The transmittance of all films was above 80% in the visible region. These results suggest that off-axis magnetron sputtering might be a potentially effective deposition method with the reduced bombardments from high-energy particles.

Original language	English
Pages (from-to)	69-77
Number of pages	9
Journal	Thin Solid Films
Volume	559
DOIs	https://doi.org/10.1016/j.tsf.2014.02.005
Publication status	Published - 2014 May 30
Externally published	Yes

Keywords

AZO
GZO
Off-axis sputtering
Scattering mechanism

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

Access to Document

10.1016/j.tsf.2014.02.005

Cite this

@article{39df87acdf7a4f38874e9511456d4f30,

title = "Transparent conductive Al and Ga doped ZnO films deposited using off-axis sputtering",

abstract = "Al and Ga doped ZnO (AZO and GZO) films were deposited using an off-axis dc magnetron sputtering method. At the off-axis positions, both the mobility and carrier density increased, resulting in enhanced conductivity of both the AZO and GZO films due to an increase in the crystallinity. The lowest resistivities of the AZO and GZO films deposited at room temperature were 1.1 × 10 - 3 Ω cm and 6.5 × 10- 4 Ω cm, respectively. Increasing the substrate temperature up to 130 °C led to a decrease in the lowest resistivity to 6.1 × 10- 4 Ω cm for the AZO films. The transmittance of all films was above 80% in the visible region. These results suggest that off-axis magnetron sputtering might be a potentially effective deposition method with the reduced bombardments from high-energy particles.",

keywords = "AZO, GZO, Off-axis sputtering, Scattering mechanism",

author = "Junjun Jia and Aya Yoshimura and Yukihiro Kagoya and Nobuto Oka and Yuzo Shigesato",

note = "Funding Information: This work was partially supported by the New Energy and Industrial Technology Development Organization (NEDO) as a project of the “ Fundamental Technology Development of Next Generation Lighting of High-efficiency and High-quality .” Copyright: Copyright 2014 Elsevier B.V., All rights reserved.",

year = "2014",

month = may,

day = "30",

doi = "10.1016/j.tsf.2014.02.005",

language = "English",

volume = "559",

pages = "69--77",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

}

TY - JOUR

T1 - Transparent conductive Al and Ga doped ZnO films deposited using off-axis sputtering

AU - Jia, Junjun

AU - Yoshimura, Aya

AU - Kagoya, Yukihiro

AU - Oka, Nobuto

AU - Shigesato, Yuzo

N1 - Funding Information: This work was partially supported by the New Energy and Industrial Technology Development Organization (NEDO) as a project of the “ Fundamental Technology Development of Next Generation Lighting of High-efficiency and High-quality .” Copyright: Copyright 2014 Elsevier B.V., All rights reserved.

PY - 2014/5/30

Y1 - 2014/5/30

N2 - Al and Ga doped ZnO (AZO and GZO) films were deposited using an off-axis dc magnetron sputtering method. At the off-axis positions, both the mobility and carrier density increased, resulting in enhanced conductivity of both the AZO and GZO films due to an increase in the crystallinity. The lowest resistivities of the AZO and GZO films deposited at room temperature were 1.1 × 10 - 3 Ω cm and 6.5 × 10- 4 Ω cm, respectively. Increasing the substrate temperature up to 130 °C led to a decrease in the lowest resistivity to 6.1 × 10- 4 Ω cm for the AZO films. The transmittance of all films was above 80% in the visible region. These results suggest that off-axis magnetron sputtering might be a potentially effective deposition method with the reduced bombardments from high-energy particles.

AB - Al and Ga doped ZnO (AZO and GZO) films were deposited using an off-axis dc magnetron sputtering method. At the off-axis positions, both the mobility and carrier density increased, resulting in enhanced conductivity of both the AZO and GZO films due to an increase in the crystallinity. The lowest resistivities of the AZO and GZO films deposited at room temperature were 1.1 × 10 - 3 Ω cm and 6.5 × 10- 4 Ω cm, respectively. Increasing the substrate temperature up to 130 °C led to a decrease in the lowest resistivity to 6.1 × 10- 4 Ω cm for the AZO films. The transmittance of all films was above 80% in the visible region. These results suggest that off-axis magnetron sputtering might be a potentially effective deposition method with the reduced bombardments from high-energy particles.

KW - AZO

KW - GZO

KW - Off-axis sputtering

KW - Scattering mechanism

UR - http://www.scopus.com/inward/record.url?scp=84899504695&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84899504695&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2014.02.005

DO - 10.1016/j.tsf.2014.02.005

M3 - Article

AN - SCOPUS:84899504695

SN - 0040-6090

VL - 559

SP - 69

EP - 77

JO - Thin Solid Films

JF - Thin Solid Films

ER -

Transparent conductive Al and Ga doped ZnO films deposited using off-axis sputtering

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this