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Triaxial force measurement cantilever by sidewall-doping with rapid thermal diffusion
Yuichiro Aoyama*, Nguyen Binh-Khiem, Kentaro Noda, Yusuke Takei, Tetsuo Kan, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
2
Citations
(Scopus)