Tribological behavior of diamond-like carbon produced by rf-PCVD based on energetic evaluation

Shuji Yamamoto*, Atsuo Kawana, Chitoshi Masuda

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)


Two types of diamond-like carbon (DLC) were evaluated for their tribological behavior in terms of the tribometer input energy. The DLC samples were prepared from methane (denoted DLC[CH4]) or benzene (denoted DLC[C6H6]) as a gas source on tungsten-carbide (WC) substrates by radio-frequency plasma chemical vapor deposition (rf-PCVD). The hydrogen contents of the DLCs were measured by Elastic Recoil Detection Analysis (ERDA). The DLC structures were investigated by Raman spectrometry and X-ray photoelectron spectroscopy (XPS). The basic mechanical properties, such as the hardness and the Young's modulus, were obtained by a nano-indenter. The DLC films against alumina were tribo-tested by a ball-on-disk. The input energy was calculated using the applied load, the friction coefficient, and the sliding distance in each tribo-test. The wear behavior of the DLC[CH4] sample was better than that of the DLC[C6H6], even though the hardness of DLC[CH4] was lower than that of DLC[C6H6]. The wear loss of DLC[CH4] and DLC[C6H6] was evaluated by the input energy, and the wear resistance difference of the DLCs was characterized in terms of the input energy.

Original languageEnglish
Pages (from-to)457-464
Number of pages8
JournalSurface and Coatings Technology
Publication statusPublished - 2013 Dec 15


  • Diamond-like carbon
  • Hydrogen contents
  • Input energy
  • Wear loss

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces


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