Tunneling acoustic microscope

Keiji Takata; Jiro Yugami; Tsuyoshi Hasegawa; Sumio Hosaka; Shigeyuki Hosoki; Tsutomu Komoda

doi:10.1143/JJAP.28.L2279

Tunneling acoustic microscope

Keiji Takata, Jiro Yugami, Tsuyoshi Hasegawa, Sumio Hosaka, Shigeyuki Hosoki, Tsutomu Komoda

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

A tunneling acoustic microscope is a new type of microscope which is based on both a scanning tunneling microscope and a technique for detecting acoustic waves. It enables simultaneous detection of force interactions between tip and sample and tunneling current. Using this new microscope, defects on silicon surface induced by thermal oxidation have been observed by detecting changes in surface conductivity with high spatial resolutions.

Original language	English
Pages (from-to)	L2279-L2280
Journal	Japanese journal of applied physics
Volume	28
Issue number	12 A
DOIs	https://doi.org/10.1143/JJAP.28.L2279
Publication status	Published - 1989 Dec
Externally published	Yes

Keywords

Conductivity
Defect
Piezoelectric transducer
Scanning tunneling microscope
Silicon
Strain
Thermal oxidation
Tunneling acoustic microscope

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/JJAP.28.L2279

Cite this

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title = "Tunneling acoustic microscope",

abstract = "A tunneling acoustic microscope is a new type of microscope which is based on both a scanning tunneling microscope and a technique for detecting acoustic waves. It enables simultaneous detection of force interactions between tip and sample and tunneling current. Using this new microscope, defects on silicon surface induced by thermal oxidation have been observed by detecting changes in surface conductivity with high spatial resolutions.",

keywords = "Conductivity, Defect, Piezoelectric transducer, Scanning tunneling microscope, Silicon, Strain, Thermal oxidation, Tunneling acoustic microscope",

author = "Keiji Takata and Jiro Yugami and Tsuyoshi Hasegawa and Sumio Hosaka and Shigeyuki Hosoki and Tsutomu Komoda",

year = "1989",

month = dec,

doi = "10.1143/JJAP.28.L2279",

language = "English",

volume = "28",

pages = "L2279--L2280",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

number = "12 A",

}

TY - JOUR

T1 - Tunneling acoustic microscope

AU - Takata, Keiji

AU - Yugami, Jiro

AU - Hasegawa, Tsuyoshi

AU - Hosaka, Sumio

AU - Hosoki, Shigeyuki

AU - Komoda, Tsutomu

PY - 1989/12

Y1 - 1989/12

N2 - A tunneling acoustic microscope is a new type of microscope which is based on both a scanning tunneling microscope and a technique for detecting acoustic waves. It enables simultaneous detection of force interactions between tip and sample and tunneling current. Using this new microscope, defects on silicon surface induced by thermal oxidation have been observed by detecting changes in surface conductivity with high spatial resolutions.

AB - A tunneling acoustic microscope is a new type of microscope which is based on both a scanning tunneling microscope and a technique for detecting acoustic waves. It enables simultaneous detection of force interactions between tip and sample and tunneling current. Using this new microscope, defects on silicon surface induced by thermal oxidation have been observed by detecting changes in surface conductivity with high spatial resolutions.

KW - Conductivity

KW - Defect

KW - Piezoelectric transducer

KW - Scanning tunneling microscope

KW - Silicon

KW - Strain

KW - Thermal oxidation

KW - Tunneling acoustic microscope

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U2 - 10.1143/JJAP.28.L2279

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M3 - Article

AN - SCOPUS:16244407617

SN - 0021-4922

VL - 28

SP - L2279-L2280

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

IS - 12 A

ER -

Tunneling acoustic microscope

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

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