Tunneling acoustic microscope

Keiji Takata, Jiro Yugami, Tsuyoshi Hasegawa, Sumio Hosaka, Shigeyuki Hosoki, Tsutomu Komoda

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)


A tunneling acoustic microscope is a new type of microscope which is based on both a scanning tunneling microscope and a technique for detecting acoustic waves. It enables simultaneous detection of force interactions between tip and sample and tunneling current. Using this new microscope, defects on silicon surface induced by thermal oxidation have been observed by detecting changes in surface conductivity with high spatial resolutions.

Original languageEnglish
Pages (from-to)L2279-L2280
JournalJapanese journal of applied physics
Issue number12 A
Publication statusPublished - 1989 Dec
Externally publishedYes


  • Conductivity
  • Defect
  • Piezoelectric transducer
  • Scanning tunneling microscope
  • Silicon
  • Strain
  • Thermal oxidation
  • Tunneling acoustic microscope

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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