Ultra-Low Resonance Frequency Mems Gravimeter with Off-Resonance Closed-Loop Control

Chengzhi Yi, Jun Wu, Hideyuki Maekoba, Arnaud Parent, Tamio Ikehashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This paper reports on a MEMS gravimeter that has a closed-loop system to maintain an ultra-low resonance frequency of 1Hz. The low resonance frequency is attained by using a spring that is the resultant of positive mechanical stiffnesses and negative electrical stiffnesses. Voltage-tunability of the electrical stiffness enables ultra-small and tunable total stiffness. To attain a quick response even at the low resonance frequency, an amplitude monitoring and tuning are done at a higher off-resonance frequency of 330Hz. We demonstrate through simulations that the temperature dependence of the resonance frequency can be eliminated by using closed-loop tuning. To prevent issues caused by the ultra-small stiffness, we employ a force-balanced system that nulls the mass displacement. The sensitivity of the gravimeter is found to be 57V/Gal.

Original languageEnglish
Title of host publicationINERTIAL 2022 - 2022 9th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781665402828
DOIs
Publication statusPublished - 2022
Event9th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2022 - Avignon, France
Duration: 2022 May 82022 May 11

Publication series

NameINERTIAL 2022 - 2022 9th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

Conference

Conference9th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2022
Country/TerritoryFrance
CityAvignon
Period22/5/822/5/11

Keywords

  • MEMS
  • force-balance
  • gravimeter
  • off-resonance

ASJC Scopus subject areas

  • Aerospace Engineering
  • Control and Systems Engineering
  • Control and Optimization
  • Instrumentation

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