@inproceedings{0647838e1d8a4d88b000e072ac2f4f13,
title = "Ultra-Low Resonance Frequency Mems Gravimeter with Off-Resonance Closed-Loop Control",
abstract = "This paper reports on a MEMS gravimeter that has a closed-loop system to maintain an ultra-low resonance frequency of 1Hz. The low resonance frequency is attained by using a spring that is the resultant of positive mechanical stiffnesses and negative electrical stiffnesses. Voltage-tunability of the electrical stiffness enables ultra-small and tunable total stiffness. To attain a quick response even at the low resonance frequency, an amplitude monitoring and tuning are done at a higher off-resonance frequency of 330Hz. We demonstrate through simulations that the temperature dependence of the resonance frequency can be eliminated by using closed-loop tuning. To prevent issues caused by the ultra-small stiffness, we employ a force-balanced system that nulls the mass displacement. The sensitivity of the gravimeter is found to be 57V/Gal.",
keywords = "MEMS, force-balance, gravimeter, off-resonance",
author = "Chengzhi Yi and Jun Wu and Hideyuki Maekoba and Arnaud Parent and Tamio Ikehashi",
note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 9th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2022 ; Conference date: 08-05-2022 Through 11-05-2022",
year = "2022",
doi = "10.1109/INERTIAL53425.2022.9787739",
language = "English",
series = "INERTIAL 2022 - 2022 9th IEEE International Symposium on Inertial Sensors and Systems, Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "INERTIAL 2022 - 2022 9th IEEE International Symposium on Inertial Sensors and Systems, Proceedings",
}