Use of EN(E) spectra for quantitative AES analysis of AuCu alloys

S. Ichimura*, T. Koshikawa, T. Sekine, K. Goto, H. Shimizu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review


The possibility of quantitative AES analysis using the whole EN(E) spectrum was examined for AuCu alloy samples. The EN(E) spectrum was measured under φ = 0° (normal) incidence of 10 keV electrons for the Au–44 at% Cu sample, and under φ = 0°, 30°, and 45° incidence of 10 keV primary electrons for the Au–20 at% Cu sample. Those spectra were compared with spectra which were obtained by linear combination of pure Au and Cu spectra measured under the same experimental conditions. Both measured and synthesized spectra coincided very well in the energy region lower than 1000 eV, except the region of slow secondary electrons. The results indicate that energy distribution of backscattered electrons of the AuCu alloy can be estimated well by linear combinations of pure sample spectra. They also indicate that, by comparison of the shape of the measured EN(E) spectrum with the synthesized one, the surface composition of the AuCu alloy sample can be estimated with reasonable accuracy (several % error).

Original languageEnglish
Pages (from-to)94-102
Number of pages9
JournalSurface and Interface Analysis
Issue number1-2
Publication statusPublished - 1988 Jan
Externally publishedYes

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry


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