Very high yield growth of vertically aligned single-walled carbon nanotubes by point-arc microwave plasma CVD

Guofang Zhong; Takayuki Iwasaki; Kotaro Honda; Yukio Furukawa; Iwao Ohdomari; Hiroshi Kawarada

doi:10.1002/cvde.200404197

Very high yield growth of vertically aligned single-walled carbon nanotubes by point-arc microwave plasma CVD

Guofang Zhong^*, Takayuki Iwasaki, Kotaro Honda, Yukio Furukawa, Iwao Ohdomari, Hiroshi Kawarada

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

91 Citations (Scopus)

Abstract

A very high yield growth of extremely dense and vertically aligned single-walled carbon nanotubes (SWNT) by Point-Arc Microwave plasma CVD were analyzed. It was observed that SWNT film thickness increases continuously with the growth time, suggesting an almost unlimited life time for the catalyst. Thin top Al₂O₃ coating plays a very important role in the aligned growth of extremely dense SWNTs. The point-arc MPCVD method is preferable for controlled growth of SWNTs at a low temperature on Si substrates coated with a sandwich-like coating structure.

Original language	English
Pages (from-to)	127-130
Number of pages	4
Journal	Chemical Vapor Deposition
Volume	11
Issue number	3
DOIs	https://doi.org/10.1002/cvde.200404197
Publication status	Published - 2005 Mar

ASJC Scopus subject areas

Chemistry(all)
Surfaces and Interfaces
Process Chemistry and Technology

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abstract = "A very high yield growth of extremely dense and vertically aligned single-walled carbon nanotubes (SWNT) by Point-Arc Microwave plasma CVD were analyzed. It was observed that SWNT film thickness increases continuously with the growth time, suggesting an almost unlimited life time for the catalyst. Thin top Al2O3 coating plays a very important role in the aligned growth of extremely dense SWNTs. The point-arc MPCVD method is preferable for controlled growth of SWNTs at a low temperature on Si substrates coated with a sandwich-like coating structure.",

author = "Guofang Zhong and Takayuki Iwasaki and Kotaro Honda and Yukio Furukawa and Iwao Ohdomari and Hiroshi Kawarada",

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AU - Zhong, Guofang

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AU - Honda, Kotaro

AU - Furukawa, Yukio

AU - Ohdomari, Iwao

AU - Kawarada, Hiroshi

PY - 2005/3

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Very high yield growth of vertically aligned single-walled carbon nanotubes by point-arc microwave plasma CVD

Abstract

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