Waveguide-integrated Si nano-photodiode with surface-plasmon antenna and its application to on-chip optical clock distribution

Junichi Fujikata; Koichi Nose; Jun Ushida; Kenichi Nishi; Masao Kinoshita; Takanori Shimizu; Toshihide Ueno; Daisuke Okamoto; Akiko Gomyo; Masayuki Mizuno; Tai Tsuchizawa; Toshifumi Watanabe; Koji Yamada; Seiichi Itabashi; Keishi Ohashi

doi:10.1143/APEX.1.022001

Waveguide-integrated Si nano-photodiode with surface-plasmon antenna and its application to on-chip optical clock distribution

Junichi Fujikata^*, Koichi Nose, Jun Ushida, Kenichi Nishi, Masao Kinoshita, Takanori Shimizu, Toshihide Ueno, Daisuke Okamoto, Akiko Gomyo, Masayuki Mizuno, Tai Tsuchizawa, Toshifumi Watanabe, Koji Yamada, Seiichi Itabashi, Keishi Ohashi

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

22 Citations (Scopus)

Abstract

We developed a waveguide-integrated Si nano-photodiode (PD) with a surface plasmon (SP) antenna for on-chip optical clock distribution. The interfacial periodic nano-scale metal-semiconductor-metal Schottky electrodes were shown to function as an SP optical antenna and also as an optical coupler between a SiON waveguide and a very thin Si-absorption layer. Furthermore, a very high speed response of 17 ps as well as enhanced photoresponsivity was achieved for a 10-μ coupling length. By using this technology, we fabricated a prototype of a large-scale-integration (LSI) on-chip optical clock system and demonstrated 5 GHz of optical clock circuit operation connected with a 4-branching H-tree structure.

Original language	English
Article number	022001
Journal	Applied Physics Express
Volume	1
Issue number	2
DOIs	https://doi.org/10.1143/APEX.1.022001
Publication status	Published - 2008 Feb
Externally published	Yes

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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Fujikata, J., Nose, K., Ushida, J., Nishi, K., Kinoshita, M., Shimizu, T., Ueno, T., Okamoto, D., Gomyo, A., Mizuno, M., Tsuchizawa, T., Watanabe, T., Yamada, K., Itabashi, S., & Ohashi, K. (2008). Waveguide-integrated Si nano-photodiode with surface-plasmon antenna and its application to on-chip optical clock distribution. Applied Physics Express, 1(2), Article 022001. https://doi.org/10.1143/APEX.1.022001

Fujikata, J, Nose, K, Ushida, J, Nishi, K, Kinoshita, M, Shimizu, T, Ueno, T, Okamoto, D, Gomyo, A, Mizuno, M, Tsuchizawa, T, Watanabe, T, Yamada, K, Itabashi, S & Ohashi, K 2008, 'Waveguide-integrated Si nano-photodiode with surface-plasmon antenna and its application to on-chip optical clock distribution', Applied Physics Express, vol. 1, no. 2, 022001. https://doi.org/10.1143/APEX.1.022001

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abstract = "We developed a waveguide-integrated Si nano-photodiode (PD) with a surface plasmon (SP) antenna for on-chip optical clock distribution. The interfacial periodic nano-scale metal-semiconductor-metal Schottky electrodes were shown to function as an SP optical antenna and also as an optical coupler between a SiON waveguide and a very thin Si-absorption layer. Furthermore, a very high speed response of 17 ps as well as enhanced photoresponsivity was achieved for a 10-μ coupling length. By using this technology, we fabricated a prototype of a large-scale-integration (LSI) on-chip optical clock system and demonstrated 5 GHz of optical clock circuit operation connected with a 4-branching H-tree structure.",

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AU - Kinoshita, Masao

AU - Shimizu, Takanori

AU - Ueno, Toshihide

AU - Okamoto, Daisuke

AU - Gomyo, Akiko

AU - Mizuno, Masayuki

AU - Tsuchizawa, Tai

AU - Watanabe, Toshifumi

AU - Yamada, Koji

AU - Itabashi, Seiichi

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AB - We developed a waveguide-integrated Si nano-photodiode (PD) with a surface plasmon (SP) antenna for on-chip optical clock distribution. The interfacial periodic nano-scale metal-semiconductor-metal Schottky electrodes were shown to function as an SP optical antenna and also as an optical coupler between a SiON waveguide and a very thin Si-absorption layer. Furthermore, a very high speed response of 17 ps as well as enhanced photoresponsivity was achieved for a 10-μ coupling length. By using this technology, we fabricated a prototype of a large-scale-integration (LSI) on-chip optical clock system and demonstrated 5 GHz of optical clock circuit operation connected with a 4-branching H-tree structure.

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Waveguide-integrated Si nano-photodiode with surface-plasmon antenna and its application to on-chip optical clock distribution

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