TY - GEN
T1 - Zig-zag ScAlN multilayer SMR for high power BAW fileter application such as RF base station
AU - Sato, Yusuke
AU - Yanagitani, Takahiko
N1 - Funding Information:
ACKNOWLEDGMENT This work was supported by the JST CREST (N0. JPMJCR20Q1) and KAKENHI (Grant-in-Aid for Scientific Research No. 19H02202, and No. 18K19037).
Publisher Copyright:
© 2020 IEEE.
PY - 2020/9/7
Y1 - 2020/9/7
N2 - RF filters for the base station require higher power durability than those for the mobile devices. Dielectric cavity resonator filters commonly used for the base station have high power durability, however the size of those filters is large. c-Axis zig-zag multilayer SMR is one of the solutions to this problem. In this study, we reported the c-axis zig-zag 12-layer ScAlN film stack on the Bragg reflector. c-Axis zig-zag ScAlN multilayer strcture was observed by scanning electron microscopy. The 12th quasi shear mode resonance excitation was clearly observed. We evaluated durability of multilayer and single layer.
AB - RF filters for the base station require higher power durability than those for the mobile devices. Dielectric cavity resonator filters commonly used for the base station have high power durability, however the size of those filters is large. c-Axis zig-zag multilayer SMR is one of the solutions to this problem. In this study, we reported the c-axis zig-zag 12-layer ScAlN film stack on the Bragg reflector. c-Axis zig-zag ScAlN multilayer strcture was observed by scanning electron microscopy. The 12th quasi shear mode resonance excitation was clearly observed. We evaluated durability of multilayer and single layer.
KW - BAW filter
KW - SMR
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U2 - 10.1109/IUS46767.2020.9251656
DO - 10.1109/IUS46767.2020.9251656
M3 - Conference contribution
AN - SCOPUS:85097883648
T3 - IEEE International Ultrasonics Symposium, IUS
BT - IUS 2020 - International Ultrasonics Symposium, Proceedings
PB - IEEE Computer Society
T2 - 2020 IEEE International Ultrasonics Symposium, IUS 2020
Y2 - 7 September 2020 through 11 September 2020
ER -