フィンガープリント
Tamio Ikehashiが活動している研究トピックを掘り下げます。このトピックラベルは、この研究者の研究成果に基づきます。これらがまとまってユニークなフィンガープリントを構成します。
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過去5年の共同研究と上位研究分野
国/地域レベルにおける最近の外部共同研究。点をクリックして詳細を開くか、または
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A Capacitance Varying Charge Pump with Exponential Stage-Number Dependence and Its Implementation by MEMS Technology
Song, M. & Ikehashi, T., 2024 1月, In: IEICE Transactions on Electronics. E107.C, 1, p. 1-11 11 p.研究成果: Article › 査読
Open Access -
A high sensitivity MEMS gravimeter with electrically tunable stiffness
Yi, C., Wu, J. & Ikehashi, T., 2024, INERTIAL 2024 - 11th IEEE International Symposium on Inertial Sensors and Systems, Proceedings. Institute of Electrical and Electronics Engineers Inc., (INERTIAL 2024 - 11th IEEE International Symposium on Inertial Sensors and Systems, Proceedings).研究成果: Conference contribution
2 !!Link opens in a new tab 被引用数 (Scopus) -
Fabrication of low-resonant-frequency inertial MEMS using through-silicon DRIE applied to silicon-on-glass
Wu, J., Zhang, H. & Ikehashi, T., 2024 5月 1, In: Japanese journal of applied physics. 63, 5, 056501.研究成果: Article › 査読
Open Access2 !!Link opens in a new tab 被引用数 (Scopus) -
Fabrication of Ultra-Low Resonance Frequency Inertial MEMS using Through-Silicon Deep-RIE Applied to Silicon-on-Glass
Wu, J., Zhang, H. & Ikehashi, T., 2023, 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. Institute of Electrical and Electronics Engineers Inc., p. 1492-1495 4 p. (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023).研究成果: Conference contribution
2 !!Link opens in a new tab 被引用数 (Scopus) -
REDUCING THERMO-ELASTIC DAMPING OF MEMS RESONATORS USING A VIRTUAL SPRING
Tang, C., Wu, Z., Heller, M., Nishinohara, D., Fujita, T. & Ikehashi, T., 2023, INERTIAL 2023 - 10th IEEE International Symposium on Inertial Sensors and Systems, Proceedings. Institute of Electrical and Electronics Engineers Inc., (INERTIAL 2023 - 10th IEEE International Symposium on Inertial Sensors and Systems, Proceedings).研究成果: Conference contribution
1 !!Link opens in a new tab 被引用数 (Scopus)