TY - GEN
T1 - A high sensitivity MEMS capacitive hydrogen sensor with inverted T-shaped electrode and ring-shaped palladium
AU - Yamazaki, Hiroaki
AU - Hayashi, Yumi
AU - Masunishi, Kei
AU - Ono, Daiki
AU - Ikehashi, Tamio
N1 - Funding Information:
Device fabrication of this work was supported by Japan Semiconductor Corporation. The authors would like to thank Y. Chiba, K. Igarashi, H. Takahashi, T. Kato, T. Ohkubo, M. Sakai and S. Sato for development of fabrication process. They are also grateful to Y. Kurui, H. Tomizawa, and T. Saito for support in the development. Last but not least, the authors would like to appreciate Y. Sugizaki and H. Shibata for their supports and encouragements.
Publisher Copyright:
© 2017 IEEE.
PY - 2017/7/26
Y1 - 2017/7/26
N2 - We report on a novel Palladium (Pd)-based MEMS capacitive hydrogen gas sensor which has an 'inverted T-shaped' electrode and a 'ring-shaped palladium' layer that enable high sensitivity. Thanks to these structures, deformation of the membrane caused by hydrogen absorption can be efficiently transduced to the capacitance change. The capacitance change was found to be 3 times larger than that of the conventional structure. The prototype sensors were fabricated by a CMOS compatible process. The sensor operation was confirmed up to the lower explosive limit of 4%vol. hydrogen. We also show that the proposed sensor has a broad design window that attains high sensitivity.
AB - We report on a novel Palladium (Pd)-based MEMS capacitive hydrogen gas sensor which has an 'inverted T-shaped' electrode and a 'ring-shaped palladium' layer that enable high sensitivity. Thanks to these structures, deformation of the membrane caused by hydrogen absorption can be efficiently transduced to the capacitance change. The capacitance change was found to be 3 times larger than that of the conventional structure. The prototype sensors were fabricated by a CMOS compatible process. The sensor operation was confirmed up to the lower explosive limit of 4%vol. hydrogen. We also show that the proposed sensor has a broad design window that attains high sensitivity.
KW - Hydrogen sensor
KW - MEMS
KW - Palladium (Pd)
KW - capacitance
UR - http://www.scopus.com/inward/record.url?scp=85029368706&partnerID=8YFLogxK
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U2 - 10.1109/TRANSDUCERS.2017.7994029
DO - 10.1109/TRANSDUCERS.2017.7994029
M3 - Conference contribution
AN - SCOPUS:85029368706
T3 - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
SP - 226
EP - 229
BT - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
Y2 - 18 June 2017 through 22 June 2017
ER -