A long-term reliability analysis of a creep-immune RF-MEMS tunable capacitor

Etsuji Ogawa; Kei Masunishi; Tamio Ikehashi; Tomohiro Saito; Hiroaki Yamazaki; Yasushi Tomizawa; Yoshiaki Sugizaki

doi:10.1109/TRANSDUCERS.2011.5969693

A long-term reliability analysis of a creep-immune RF-MEMS tunable capacitor

Etsuji Ogawa^*, Kei Masunishi, Tamio Ikehashi, Tomohiro Saito, Hiroaki Yamazaki, Yasushi Tomizawa, Yoshiaki Sugizaki

^*この研究の対応する著者

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

Actuators used in RF-MEMS tunable capacitors have an issue of creep-induced deformation. The creep is caused by a ductile-metal beam which is indispensable to attain the low loss. To avoid this issue, we previously reported an actuator structure that uses a brittle material, silicon nitride (SiN), at the stress-concentrated spring portions [1]. The present paper aims to clarify a long-term creep immunity of the actuator. We first determined parameters of Norton's law by measurements and then carried out Finite Element Method (FEM) simulations. As a result, we found that the shift of the up-state capacitance is 2.2% after keeping the actuator in down-state position for 3 years at 85°C.

本文言語	English
ホスト出版物のタイトル	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
ページ	2466-2469
ページ数	4
DOI	https://doi.org/10.1109/TRANSDUCERS.2011.5969693
出版ステータス	Published - 2011 9月 1
外部発表	はい
イベント	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China 継続期間: 2011 6月 5 → 2011 6月 9

出版物シリーズ

名前	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Conference

Conference	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
国/地域	China
City	Beijing
Period	11/6/5 → 11/6/9

ASJC Scopus subject areas

ハードウェアとアーキテクチャ
電子工学および電気工学

文献へのアクセス

10.1109/TRANSDUCERS.2011.5969693

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引用スタイル

Ogawa, E., Masunishi, K., Ikehashi, T., Saito, T., Yamazaki, H., Tomizawa, Y., & Sugizaki, Y. (2011). A long-term reliability analysis of a creep-immune RF-MEMS tunable capacitor. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 2466-2469). Article 5969693 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969693

A long-term reliability analysis of a creep-immune RF-MEMS tunable capacitor. / Ogawa, Etsuji; Masunishi, Kei; Ikehashi, Tamio その他.
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 2466-2469 5969693 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

研究成果: Conference contribution

Ogawa, E, Masunishi, K, Ikehashi, T, Saito, T, Yamazaki, H, Tomizawa, Y & Sugizaki, Y 2011, A long-term reliability analysis of a creep-immune RF-MEMS tunable capacitor. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969693, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, pp. 2466-2469, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 11/6/5. https://doi.org/10.1109/TRANSDUCERS.2011.5969693

Ogawa E, Masunishi K, Ikehashi T, Saito T, Yamazaki H, Tomizawa Y その他. A long-term reliability analysis of a creep-immune RF-MEMS tunable capacitor. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 2466-2469. 5969693. (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). doi: 10.1109/TRANSDUCERS.2011.5969693

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abstract = "Actuators used in RF-MEMS tunable capacitors have an issue of creep-induced deformation. The creep is caused by a ductile-metal beam which is indispensable to attain the low loss. To avoid this issue, we previously reported an actuator structure that uses a brittle material, silicon nitride (SiN), at the stress-concentrated spring portions [1]. The present paper aims to clarify a long-term creep immunity of the actuator. We first determined parameters of Norton's law by measurements and then carried out Finite Element Method (FEM) simulations. As a result, we found that the shift of the up-state capacitance is 2.2% after keeping the actuator in down-state position for 3 years at 85°C.",

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AU - Yamazaki, Hiroaki

AU - Tomizawa, Yasushi

AU - Sugizaki, Yoshiaki

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AB - Actuators used in RF-MEMS tunable capacitors have an issue of creep-induced deformation. The creep is caused by a ductile-metal beam which is indispensable to attain the low loss. To avoid this issue, we previously reported an actuator structure that uses a brittle material, silicon nitride (SiN), at the stress-concentrated spring portions [1]. The present paper aims to clarify a long-term creep immunity of the actuator. We first determined parameters of Norton's law by measurements and then carried out Finite Element Method (FEM) simulations. As a result, we found that the shift of the up-state capacitance is 2.2% after keeping the actuator in down-state position for 3 years at 85°C.

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A long-term reliability analysis of a creep-immune RF-MEMS tunable capacitor

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