A long-term reliability analysis of a creep-immune RF-MEMS tunable capacitor

Etsuji Ogawa^*, Kei Masunishi, Tamio Ikehashi, Tomohiro Saito, Hiroaki Yamazaki, Yasushi Tomizawa, Yoshiaki Sugizaki

^*この研究の対応する著者

研究成果: Conference contribution