TY - JOUR
T1 - A method for evaluating acoustic Bragg reflector by ultrasonic microscope
AU - Ishii, Naoki
AU - Kondo, Keita
AU - Yanagitani, Takahiko
N1 - Funding Information:
ACKNOWLEDGMENT This work was supported by the JST CREST (No. JPMJCR20Q1) and KAKENHI (Grant-in-Aid for Scientific Research No. 19H02202, and No. 21K18734).
Publisher Copyright:
© 2021 IEEE.
PY - 2021
Y1 - 2021
N2 - Bragg reflector in solidly mounted resonators (SMR) is usually evaluated by comparing entire impedance properties of SMR with the properties of free standing FBAR. Therefore, we cannot obtain piezoelectric layer and Bragg reflector separatory. We here present a experimental method for evaluating acoustic properties of Bragg reflectors using pulse-echo method in the GHz ranges. High quality Sc0.40Al0.60N film transducers with acoustic conversion loss of 5.4 dB and fractional band width of 106% were employed. Ta2O5/SiO2Bragg reflectors were prepared as a test sample. As a result, the experimentally extracted mechanical properties of Bragg reflector showed good agreement with theoretical prediction simulated by Mason's equivalent circuit model.
AB - Bragg reflector in solidly mounted resonators (SMR) is usually evaluated by comparing entire impedance properties of SMR with the properties of free standing FBAR. Therefore, we cannot obtain piezoelectric layer and Bragg reflector separatory. We here present a experimental method for evaluating acoustic properties of Bragg reflectors using pulse-echo method in the GHz ranges. High quality Sc0.40Al0.60N film transducers with acoustic conversion loss of 5.4 dB and fractional band width of 106% were employed. Ta2O5/SiO2Bragg reflectors were prepared as a test sample. As a result, the experimentally extracted mechanical properties of Bragg reflector showed good agreement with theoretical prediction simulated by Mason's equivalent circuit model.
KW - Bragg reflector
KW - Pulse echo method
KW - SMR
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U2 - 10.1109/IUS52206.2021.9593536
DO - 10.1109/IUS52206.2021.9593536
M3 - Conference article
AN - SCOPUS:85122885198
SN - 1948-5719
JO - IEEE International Ultrasonics Symposium, IUS
JF - IEEE International Ultrasonics Symposium, IUS
T2 - 2021 IEEE International Ultrasonics Symposium, IUS 2021
Y2 - 11 September 2011 through 16 September 2011
ER -