抄録
A new ion counting system was devised for time-of-flight mass detection in sputtered neutral mass spectrometry (SNMS), using a pulse laser for postionization. A microchannel plate (MCP) intensifier used as a detector was gated by a retarding grid in front of the MCP for particular masses. High peak-counting ability (exceeding 1010 counts per second) of the system for ionization with a laser pulse (20–30 ns) was maintained for mass-selective detection. The performance of the new counting system at a high count rate was analyzed, and the detection limit and the accuracy were discussed.
| 本文言語 | English |
|---|---|
| ページ（範囲） | L1209-L1212 |
| ジャーナル | Japanese journal of applied physics |
| 巻 | 29 |
| 号 | 7 |
| DOI | |
| 出版ステータス | Published - 1990 7月 |
| 外部発表 | はい |
ASJC Scopus subject areas
- 工学（全般）
- 物理学および天文学（全般）