A new ozone decomposition method using redox reactions of transition metals

H. Nonaka*, A. Kurokawa, S. Ichimura, T. Nishiguchi, Y. Morikawa, M. Miyamoto

*この研究の対応する著者

研究成果: Article査読

抄録

We built a new type ozone killer based on the redox reactions between cuprous and cupric oxides and applied it to the decomposition of low-pressure highly concentrated ozone. The analysis of the exhaust gas from the ozone killer by low-temperature thermal desorption measurement shows that ozone flux of 1.6 PaLs-1 can be decomposed completely to oxygen when the copper fins in the ozone killer were heated to 470°C. The copper fins, however, must be kept at even higher temperatures to decompose continuous and larger-flux of ozone since the oxidation of the fins turned out to proceed into the bulk at 470°C.

本文言語English
ページ(範囲)221-224
ページ数4
ジャーナルShinku/Journal of the Vacuum Society of Japan
44
3
DOI
出版ステータスPublished - 2001
外部発表はい

ASJC Scopus subject areas

  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 電子工学および電気工学

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