抄録
We built a new type ozone killer based on the redox reactions between cuprous and cupric oxides and applied it to the decomposition of low-pressure highly concentrated ozone. The analysis of the exhaust gas from the ozone killer by low-temperature thermal desorption measurement shows that ozone flux of 1.6 PaLs-1 can be decomposed completely to oxygen when the copper fins in the ozone killer were heated to 470°C. The copper fins, however, must be kept at even higher temperatures to decompose continuous and larger-flux of ozone since the oxidation of the fins turned out to proceed into the bulk at 470°C.
本文言語 | English |
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ページ(範囲) | 221-224 |
ページ数 | 4 |
ジャーナル | Shinku/Journal of the Vacuum Society of Japan |
巻 | 44 |
号 | 3 |
DOI | |
出版ステータス | Published - 2001 |
外部発表 | はい |
ASJC Scopus subject areas
- 凝縮系物理学
- 表面、皮膜および薄膜
- 電子工学および電気工学