A novel fabrication of in-channel 3-D micromesh structure using maskless multi-angle exposure and its microfilter application

Hironobu Sato; Takayuki Kakinuma; Jeung Sang Go; Shuichi Shoji

A novel fabrication of in-channel 3-D micromesh structure using maskless multi-angle exposure and its microfilter application

Hironobu Sato^*, Takayuki Kakinuma, Jeung Sang Go, Shuichi Shoji

^*この研究の対応する著者

基幹理工学部

研究成果: Paper › 査読

44 被引用数 (Scopus)

抄録

This paper presents a novel fabrication method of in-channel three-dimensional micromesh structures using the conventional photolithography. The micromesh was realized by exposing UV light from the backside of the SU-8 coated metal-patterned glass substrate for different angles. Numbers of exposure and irradiation angle decided the shape and the size of micromesh. Based on this technique, three different micromesh-inserted microchannel structures were fabricated. For hydrodynamic characterization, their flow resistances were measured. Finally, for the application of Micro Total Analysis System (μTAS), the microfilter was fabricated and its filtering property was demonstrated.

本文言語	English
ページ	223-226
ページ数	4
出版ステータス	Published - 2003 7月 23
イベント	IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan 継続期間: 2003 1月 19 → 2003 1月 23

Conference

Conference	IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems
国/地域	Japan
City	Kyoto
Period	03/1/19 → 03/1/23

ASJC Scopus subject areas

制御およびシステム工学
機械工学
電子工学および電気工学

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引用スタイル

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abstract = "This paper presents a novel fabrication method of in-channel three-dimensional micromesh structures using the conventional photolithography. The micromesh was realized by exposing UV light from the backside of the SU-8 coated metal-patterned glass substrate for different angles. Numbers of exposure and irradiation angle decided the shape and the size of micromesh. Based on this technique, three different micromesh-inserted microchannel structures were fabricated. For hydrodynamic characterization, their flow resistances were measured. Finally, for the application of Micro Total Analysis System (μTAS), the microfilter was fabricated and its filtering property was demonstrated.",

author = "Hironobu Sato and Takayuki Kakinuma and Go, {Jeung Sang} and Shuichi Shoji",

year = "2003",

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AU - Sato, Hironobu

AU - Kakinuma, Takayuki

AU - Go, Jeung Sang

AU - Shoji, Shuichi

PY - 2003/7/23

Y1 - 2003/7/23

N2 - This paper presents a novel fabrication method of in-channel three-dimensional micromesh structures using the conventional photolithography. The micromesh was realized by exposing UV light from the backside of the SU-8 coated metal-patterned glass substrate for different angles. Numbers of exposure and irradiation angle decided the shape and the size of micromesh. Based on this technique, three different micromesh-inserted microchannel structures were fabricated. For hydrodynamic characterization, their flow resistances were measured. Finally, for the application of Micro Total Analysis System (μTAS), the microfilter was fabricated and its filtering property was demonstrated.

AB - This paper presents a novel fabrication method of in-channel three-dimensional micromesh structures using the conventional photolithography. The micromesh was realized by exposing UV light from the backside of the SU-8 coated metal-patterned glass substrate for different angles. Numbers of exposure and irradiation angle decided the shape and the size of micromesh. Based on this technique, three different micromesh-inserted microchannel structures were fabricated. For hydrodynamic characterization, their flow resistances were measured. Finally, for the application of Micro Total Analysis System (μTAS), the microfilter was fabricated and its filtering property was demonstrated.

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