A novel mobility-variation-free extraction technique of capacitance coupling coefficient for stacked flash memory cell

T. Okagaki; M. Tanizawa; M. Fujinaga; T. Kunikiyo; H. Yuki; K. Ishikawa; Y. Nishikawa; T. Eimori; M. Inuishi; Y. Oji

A novel mobility-variation-free extraction technique of capacitance coupling coefficient for stacked flash memory cell

T. Okagaki^*, M. Tanizawa, M. Fujinaga, T. Kunikiyo, H. Yuki, K. Ishikawa, Y. Nishikawa, T. Eimori, M. Inuishi, Y. Oji

^*この研究の対応する著者

研究成果: Paper › 査読

抄録

We propose a novel extraction technique of the control gate capacitance coupling coefficient(α_g) for stacked gate flash memory cell. Five novel test patterns that the CBCM method is applied to, are developed to directly measure all the capacitances connected to the floating gate. Comparison of extracted α_g with the TCAD result proves the validity of this technique. Moreover, we have confirmed that conventional techniques, which use the channel current characteristics, overestimate the α_g variation due to channel mobility variation. Therefore direct α_g extraction using our proposed technique is necessary for precise process monitoring.

本文言語	English
ページ	219-222
ページ数	4
出版ステータス	Published - 2005 11月 15
外部発表	はい
イベント	ICMTS 2005 - 2005 IEEE International Conference on Microelectronic Test Structures - Leuven, Belgium 継続期間: 2005 4月 4 → 2005 4月 7

Other

Other	ICMTS 2005 - 2005 IEEE International Conference on Microelectronic Test Structures
国/地域	Belgium
City	Leuven
Period	05/4/4 → 05/4/7

ASJC Scopus subject areas

電子工学および電気工学

他のファイルとリンク

引用スタイル

Okagaki, T., Tanizawa, M., Fujinaga, M., Kunikiyo, T., Yuki, H., Ishikawa, K., Nishikawa, Y., Eimori, T., Inuishi, M., & Oji, Y. (2005). A novel mobility-variation-free extraction technique of capacitance coupling coefficient for stacked flash memory cell. 219-222. Paper presented at ICMTS 2005 - 2005 IEEE International Conference on Microelectronic Test Structures, Leuven, Belgium.

Okagaki, T, Tanizawa, M, Fujinaga, M, Kunikiyo, T, Yuki, H, Ishikawa, K, Nishikawa, Y, Eimori, T, Inuishi, M & Oji, Y 2005, 'A novel mobility-variation-free extraction technique of capacitance coupling coefficient for stacked flash memory cell', Paper presented at ICMTS 2005 - 2005 IEEE International Conference on Microelectronic Test Structures, Leuven, Belgium, 05/4/4 - 05/4/7 pp. 219-222.

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abstract = "We propose a novel extraction technique of the control gate capacitance coupling coefficient(αg) for stacked gate flash memory cell. Five novel test patterns that the CBCM method is applied to, are developed to directly measure all the capacitances connected to the floating gate. Comparison of extracted αg with the TCAD result proves the validity of this technique. Moreover, we have confirmed that conventional techniques, which use the channel current characteristics, overestimate the αg variation due to channel mobility variation. Therefore direct αg extraction using our proposed technique is necessary for precise process monitoring.",

author = "T. Okagaki and M. Tanizawa and M. Fujinaga and T. Kunikiyo and H. Yuki and K. Ishikawa and Y. Nishikawa and T. Eimori and M. Inuishi and Y. Oji",

year = "2005",

month = nov,

day = "15",

language = "English",

pages = "219--222",

note = "ICMTS 2005 - 2005 IEEE International Conference on Microelectronic Test Structures ; Conference date: 04-04-2005 Through 07-04-2005",

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T1 - A novel mobility-variation-free extraction technique of capacitance coupling coefficient for stacked flash memory cell

AU - Okagaki, T.

AU - Tanizawa, M.

AU - Fujinaga, M.

AU - Kunikiyo, T.

AU - Yuki, H.

AU - Ishikawa, K.

AU - Nishikawa, Y.

AU - Eimori, T.

AU - Inuishi, M.

AU - Oji, Y.

PY - 2005/11/15

Y1 - 2005/11/15

N2 - We propose a novel extraction technique of the control gate capacitance coupling coefficient(αg) for stacked gate flash memory cell. Five novel test patterns that the CBCM method is applied to, are developed to directly measure all the capacitances connected to the floating gate. Comparison of extracted αg with the TCAD result proves the validity of this technique. Moreover, we have confirmed that conventional techniques, which use the channel current characteristics, overestimate the αg variation due to channel mobility variation. Therefore direct αg extraction using our proposed technique is necessary for precise process monitoring.

AB - We propose a novel extraction technique of the control gate capacitance coupling coefficient(αg) for stacked gate flash memory cell. Five novel test patterns that the CBCM method is applied to, are developed to directly measure all the capacitances connected to the floating gate. Comparison of extracted αg with the TCAD result proves the validity of this technique. Moreover, we have confirmed that conventional techniques, which use the channel current characteristics, overestimate the αg variation due to channel mobility variation. Therefore direct αg extraction using our proposed technique is necessary for precise process monitoring.

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M3 - Paper

AN - SCOPUS:27644438999

SP - 219

EP - 222

T2 - ICMTS 2005 - 2005 IEEE International Conference on Microelectronic Test Structures

Y2 - 4 April 2005 through 7 April 2005

ER -

A novel mobility-variation-free extraction technique of capacitance coupling coefficient for stacked flash memory cell

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Other

ASJC Scopus subject areas

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