This paper describes a parallel piezoresistive cantilever that is composed of a force-sensing cantilever in addition to a reference cantilever for photoresponse compensation. Piezoresistive cantilevers have been applied in many cellular mechanical measurement studies because of their high sensitivity, high time resolution and ease of handling. However, the electrical resistance changes in response to the excitation light of the fluorescence microscope, which affects the cell measurements. We measured the I-V characteristics of a piezoresistive layer. These photoresponses occurred due to the internal photoelectric effect. We canceled the photoresponses using the reference cantilever. This paper demonstrates compensation of the cantilever photoresponse under irradiation at different angles, wavelengths and light intensities. As a result, the photoresponse could be decreased by 87%.
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