抄録
An RF MEMS variable capacitor using hybrid actuation of piezoelectric and electrostatic forces is presented. A surface micromachining process is used to fabricate the device. The piezoelectric actuator, which uses thin film PZT, enables low voltage actuation while the electrostatic actuator realizes large capacitance ratio. The measured capacitance ratio is Cmax/Cmin=14 at 5V. We demonstrate that the hybrid actuation enables to lower the pull-in voltage without changing the pull-out voltage. We also show that the shift of pull-out voltage due to dielectric charging can be reduced drastically at actuation voltages below 10V. In this sense, the hybrid actuation can realize low voltage operation with enhanced robustness for stiction.
本文言語 | English |
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論文番号 | 4014812 |
ページ(範囲) | 39-42 |
ページ数 | 4 |
ジャーナル | IEEE MTT-S International Microwave Symposium Digest |
DOI | |
出版ステータス | Published - 2006 12月 1 |
外部発表 | はい |
イベント | 2006 IEEE MTT-S International Microwave Symposium Digest - San Francisco, CA, United States 継続期間: 2006 6月 11 → 2006 6月 16 |
ASJC Scopus subject areas
- 放射線
- 凝縮系物理学
- 電子工学および電気工学