A robust RF MEMS variable capacitor with piezoelectric and electrostatic actuation

T. Ikehashi; T. Ohguro; E. Ogawa; H. Yamazaki; K. Kojima; M. Matsuo; K. Ishimaru; H. Ishiuchi

doi:10.1109/MWSYM.2006.249903

A robust RF MEMS variable capacitor with piezoelectric and electrostatic actuation

T. Ikehashi^*, T. Ohguro, E. Ogawa, H. Yamazaki, K. Kojima, M. Matsuo, K. Ishimaru, H. Ishiuchi

^*この研究の対応する著者

研究成果: Conference article › 査読

18 被引用数 (Scopus)

抄録

An RF MEMS variable capacitor using hybrid actuation of piezoelectric and electrostatic forces is presented. A surface micromachining process is used to fabricate the device. The piezoelectric actuator, which uses thin film PZT, enables low voltage actuation while the electrostatic actuator realizes large capacitance ratio. The measured capacitance ratio is Cmax/Cmin=14 at 5V. We demonstrate that the hybrid actuation enables to lower the pull-in voltage without changing the pull-out voltage. We also show that the shift of pull-out voltage due to dielectric charging can be reduced drastically at actuation voltages below 10V. In this sense, the hybrid actuation can realize low voltage operation with enhanced robustness for stiction.

本文言語	English
論文番号	4014812
ページ（範囲）	39-42
ページ数	4
ジャーナル	IEEE MTT-S International Microwave Symposium Digest
DOI	https://doi.org/10.1109/MWSYM.2006.249903
出版ステータス	Published - 2006 12月 1
外部発表	はい
イベント	2006 IEEE MTT-S International Microwave Symposium Digest - San Francisco, CA, United States 継続期間: 2006 6月 11 → 2006 6月 16

ASJC Scopus subject areas

放射線
凝縮系物理学
電子工学および電気工学

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10.1109/MWSYM.2006.249903

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title = "A robust RF MEMS variable capacitor with piezoelectric and electrostatic actuation",

abstract = "An RF MEMS variable capacitor using hybrid actuation of piezoelectric and electrostatic forces is presented. A surface micromachining process is used to fabricate the device. The piezoelectric actuator, which uses thin film PZT, enables low voltage actuation while the electrostatic actuator realizes large capacitance ratio. The measured capacitance ratio is Cmax/Cmin=14 at 5V. We demonstrate that the hybrid actuation enables to lower the pull-in voltage without changing the pull-out voltage. We also show that the shift of pull-out voltage due to dielectric charging can be reduced drastically at actuation voltages below 10V. In this sense, the hybrid actuation can realize low voltage operation with enhanced robustness for stiction.",

keywords = "Dielectric charging, Piezoelectric actuator, RF MEMS, Stiction, Surface micromachining, Variable capacitor",

author = "T. Ikehashi and T. Ohguro and E. Ogawa and H. Yamazaki and K. Kojima and M. Matsuo and K. Ishimaru and H. Ishiuchi",

year = "2006",

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doi = "10.1109/MWSYM.2006.249903",

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journal = "IEEE MTT-S International Microwave Symposium Digest",

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T1 - A robust RF MEMS variable capacitor with piezoelectric and electrostatic actuation

AU - Ikehashi, T.

AU - Ohguro, T.

AU - Ogawa, E.

AU - Yamazaki, H.

AU - Kojima, K.

AU - Matsuo, M.

AU - Ishimaru, K.

AU - Ishiuchi, H.

PY - 2006/12/1

Y1 - 2006/12/1

N2 - An RF MEMS variable capacitor using hybrid actuation of piezoelectric and electrostatic forces is presented. A surface micromachining process is used to fabricate the device. The piezoelectric actuator, which uses thin film PZT, enables low voltage actuation while the electrostatic actuator realizes large capacitance ratio. The measured capacitance ratio is Cmax/Cmin=14 at 5V. We demonstrate that the hybrid actuation enables to lower the pull-in voltage without changing the pull-out voltage. We also show that the shift of pull-out voltage due to dielectric charging can be reduced drastically at actuation voltages below 10V. In this sense, the hybrid actuation can realize low voltage operation with enhanced robustness for stiction.

AB - An RF MEMS variable capacitor using hybrid actuation of piezoelectric and electrostatic forces is presented. A surface micromachining process is used to fabricate the device. The piezoelectric actuator, which uses thin film PZT, enables low voltage actuation while the electrostatic actuator realizes large capacitance ratio. The measured capacitance ratio is Cmax/Cmin=14 at 5V. We demonstrate that the hybrid actuation enables to lower the pull-in voltage without changing the pull-out voltage. We also show that the shift of pull-out voltage due to dielectric charging can be reduced drastically at actuation voltages below 10V. In this sense, the hybrid actuation can realize low voltage operation with enhanced robustness for stiction.

KW - Dielectric charging

KW - Piezoelectric actuator

KW - RF MEMS

KW - Stiction

KW - Surface micromachining

KW - Variable capacitor

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A robust RF MEMS variable capacitor with piezoelectric and electrostatic actuation

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