TY - GEN
T1 - A trend mining method for yield improvement based on trend in time series
AU - Tsuda, Hidetaka
AU - Shirai, Hidehiro
AU - Terabe, Masahiro
AU - Hashimoto, Kazuo
AU - Shinohara, Ayumi
PY - 2008/12/1
Y1 - 2008/12/1
N2 - We have developed a trend mining method for yield improvement which extracts non-random trend in time series buried in huge time series data. This method efficiently extracts failure causes based on trend in time series that had been almost unable to be analyzed by conventional methods.
AB - We have developed a trend mining method for yield improvement which extracts non-random trend in time series buried in huge time series data. This method efficiently extracts failure causes based on trend in time series that had been almost unable to be analyzed by conventional methods.
UR - http://www.scopus.com/inward/record.url?scp=79952567362&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=79952567362&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:79952567362
SN - 9784990413828
T3 - IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings
SP - 247
EP - 250
BT - 2008 International Symposium on Semiconductor Manufacturing, ISSM 2008
T2 - 2008 17th International Symposium on Semiconductor Manufacturing, ISSM 2008
Y2 - 27 October 2008 through 29 October 2008
ER -