Alkyl monolayers on Si(111) as ultrathin electron-beam patterning media

Taro Yamada, Nao Takano, Keiko Yamada, Shuhei Yoshitomi, Tomoyuki Inoue, Tetsuya Osaka

研究成果: Article査読

10 被引用数 (Scopus)


A process of electron-beam patterning of the surface of a Si(111) wafer was developed by utilizing alkyl monolayers as ultrathin patterning media. We performed chemical benchmark tests of the electron-beam patterning of alkyl monolayers on Si(111) in ambient oxygen, followed by the deposition of a metal on bombarded areas by immersion into an aqueous solution containing metal ions of the metal to be deposited. We investigated practically important issues related to this process, such as the robustness of organic monolayers against oxidation in aqueous media, the contrast enhancement of the bombarded areas by metal deposition, and the detectability of electron-bombarded areas of the monolayers by scanning tunneling microscopy (STM). The alkyl-covered Si(111) surface was significantly resistant to the oxidation by dissolved O2 in pure water, compared to hydrogen-terminated Si(111). By immersion into a solution containing CuSO4+HF+NH4F, electron-bombarded areas were visualized by the presence of the deposit of Cu. Electron-bombarded areas were also distinguishable from intact areas in terms of height contrast or roughness measured by STM. These results indicate the usefulness of alkyl monolayers for nano-scale patterning on silicon wafers.

ジャーナルJournal of Electroanalytical Chemistry
出版ステータスPublished - 2002 9月 6

ASJC Scopus subject areas

  • 分析化学
  • 化学工学一般
  • 電気化学


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