AlN powder synthesis via nitriding reaction of aluminum sub-chloride

In this investigation, aluminum nitride powder was successfully synthesized by the reaction of ammonia with a mixture of aluminum chloride vapor species (AlClx; x = 1, 2 and 3) in a flow-tube reactor at 1000 and 1200 K. These aluminum chloride vapor species were produced by reacting chlorine with molten aluminum in the flow-tube reactor at the same temperature as synthetic temperature. The aluminum nitride powders synthesized under various ammonia concentrations were characterized for size distribution, mean particle size and particle morphology. Those synthesized at the higher temperature had a mean particle size of 0.2 to 0.4 μm with a narrow size distribution range.